MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements
A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaph...
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| Format: | Article |
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MDPI AG
2020-04-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/8/2233 |
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| author | Ning Zhou Pinggang Jia Jia Liu Qianyu Ren Guowen An Ting Liang Jijun Xiong |
| author_facet | Ning Zhou Pinggang Jia Jia Liu Qianyu Ren Guowen An Ting Liang Jijun Xiong |
| author_sort | Ning Zhou |
| collection | DOAJ |
| description | A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature. |
| first_indexed | 2024-03-10T20:27:34Z |
| format | Article |
| id | doaj.art-e3acb9defb0746ef82cae959340dbe2b |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T20:27:34Z |
| publishDate | 2020-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-e3acb9defb0746ef82cae959340dbe2b2023-11-19T21:42:01ZengMDPI AGSensors1424-82202020-04-01208223310.3390/s20082233MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure MeasurementsNing Zhou0Pinggang Jia1Jia Liu2Qianyu Ren3Guowen An4Ting Liang5Jijun Xiong6Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, ChinaA reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature.https://www.mdpi.com/1424-8220/20/8/2233fiber-opticreflective intensity modulatedMEMSgas pressure sensor |
| spellingShingle | Ning Zhou Pinggang Jia Jia Liu Qianyu Ren Guowen An Ting Liang Jijun Xiong MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements Sensors fiber-optic reflective intensity modulated MEMS gas pressure sensor |
| title | MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements |
| title_full | MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements |
| title_fullStr | MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements |
| title_full_unstemmed | MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements |
| title_short | MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements |
| title_sort | mems based reflective intensity modulated fiber optic sensor for pressure measurements |
| topic | fiber-optic reflective intensity modulated MEMS gas pressure sensor |
| url | https://www.mdpi.com/1424-8220/20/8/2233 |
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