MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements

MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements

A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaph...

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Bibliographic Details
Main Authors:	Ning Zhou, Pinggang Jia, Jia Liu, Qianyu Ren, Guowen An, Ting Liang, Jijun Xiong
Format:	Article
Language:	English
Published:	MDPI AG 2020-04-01
Series:	Sensors
Subjects:	fiber-optic reflective intensity modulated MEMS gas pressure sensor
Online Access:	https://www.mdpi.com/1424-8220/20/8/2233

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