Scheduling of Automated Wet-Etch Stations
Semiconductor manufacturing has recently attracted an increased attention in process optimization research. Various MILP and constraint programming methods were published to solve the scheduling problem arising in the wet-etching systems. In the present work, improvements are given to these state-of...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIDIC Servizi S.r.l.
2014-08-01
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| Series: | Chemical Engineering Transactions |
| Online Access: | https://www.cetjournal.it/index.php/cet/article/view/5374 |