Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVD

Abstract van der Waals heterostructures based on graphene and hBN layers with different stacking modes are receiving considerable attention because of their potential application in fundamental physics. However, conventional exfoliation fabrication methods and layer‐by‐layer transfer techniques have...

Full description

Bibliographic Details
Main Authors: Bo Tian, Junzhu Li, Mingguang Chen, Haocong Dong, Xixiang Zhang
Format: Article
Language:English
Published: Wiley 2022-07-01
Series:Advanced Science
Subjects:
Online Access:https://doi.org/10.1002/advs.202201324
_version_ 1818177479425130496
author Bo Tian
Junzhu Li
Mingguang Chen
Haocong Dong
Xixiang Zhang
author_facet Bo Tian
Junzhu Li
Mingguang Chen
Haocong Dong
Xixiang Zhang
author_sort Bo Tian
collection DOAJ
description Abstract van der Waals heterostructures based on graphene and hBN layers with different stacking modes are receiving considerable attention because of their potential application in fundamental physics. However, conventional exfoliation fabrication methods and layer‐by‐layer transfer techniques have various limitations. The CVD synthesis of high‐quality large‐area graphene and hBN multilayer heterostructures is essential for the advancement of new physics. Herein, the authors propose an in situ CVD growth strategy for synthesizing wafer‐scale AAB‐stacked single‐crystal graphene/hBN/graphene trilayer van der Waals heterostructures. Single‐crystal CuNi(111) alloys are prepared on sapphire, followed by the pre‐dissolution of carbon atoms. Single‐crystal monolayer hBN is synthesized on a plasma‐cleaned CuNi(111) surface. Then, a single‐crystal monolayer graphene is epitaxially grown onto the hBN surface to form graphene/hBN bilayer heterostructures. A controlled decrease in the growth temperature allows the carbon atoms to precipitate out of the CuNi(111) alloy to form single‐crystal graphene at the interface between hBN and CuNi(111), thereby producing graphene/hBN/graphene trilayer van der Waals heterostructures. The stacking modes between as‐grown 2D layers are investigated through Raman spectroscopy and transmission electron microscopy. This study provides an in situ CVD approach to directly synthesize large‐scale single‐crystal low‐dimensional van der Waals heterostructures and facilitates their application in future 2D‐material‐based integrated circuits.
first_indexed 2024-12-11T20:32:44Z
format Article
id doaj.art-e4178f75ec7549acaa1549464662083d
institution Directory Open Access Journal
issn 2198-3844
language English
last_indexed 2024-12-11T20:32:44Z
publishDate 2022-07-01
publisher Wiley
record_format Article
series Advanced Science
spelling doaj.art-e4178f75ec7549acaa1549464662083d2022-12-22T00:51:45ZengWileyAdvanced Science2198-38442022-07-01921n/an/a10.1002/advs.202201324Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVDBo Tian0Junzhu Li1Mingguang Chen2Haocong Dong3Xixiang Zhang4Physical Science and Engineering Division King Abdullah University of Science and Technology (KAUST) Thuwal 23955–6900 Saudi ArabiaPhysical Science and Engineering Division King Abdullah University of Science and Technology (KAUST) Thuwal 23955–6900 Saudi ArabiaPhysical Science and Engineering Division King Abdullah University of Science and Technology (KAUST) Thuwal 23955–6900 Saudi ArabiaEleven‐Dimensional Nanomaterial Research Institute Xiamen 361000 P. R. ChinaPhysical Science and Engineering Division King Abdullah University of Science and Technology (KAUST) Thuwal 23955–6900 Saudi ArabiaAbstract van der Waals heterostructures based on graphene and hBN layers with different stacking modes are receiving considerable attention because of their potential application in fundamental physics. However, conventional exfoliation fabrication methods and layer‐by‐layer transfer techniques have various limitations. The CVD synthesis of high‐quality large‐area graphene and hBN multilayer heterostructures is essential for the advancement of new physics. Herein, the authors propose an in situ CVD growth strategy for synthesizing wafer‐scale AAB‐stacked single‐crystal graphene/hBN/graphene trilayer van der Waals heterostructures. Single‐crystal CuNi(111) alloys are prepared on sapphire, followed by the pre‐dissolution of carbon atoms. Single‐crystal monolayer hBN is synthesized on a plasma‐cleaned CuNi(111) surface. Then, a single‐crystal monolayer graphene is epitaxially grown onto the hBN surface to form graphene/hBN bilayer heterostructures. A controlled decrease in the growth temperature allows the carbon atoms to precipitate out of the CuNi(111) alloy to form single‐crystal graphene at the interface between hBN and CuNi(111), thereby producing graphene/hBN/graphene trilayer van der Waals heterostructures. The stacking modes between as‐grown 2D layers are investigated through Raman spectroscopy and transmission electron microscopy. This study provides an in situ CVD approach to directly synthesize large‐scale single‐crystal low‐dimensional van der Waals heterostructures and facilitates their application in future 2D‐material‐based integrated circuits.https://doi.org/10.1002/advs.202201324AAB‐stackinggraphenehBNin situ CVDvan der Waals heterostructures
spellingShingle Bo Tian
Junzhu Li
Mingguang Chen
Haocong Dong
Xixiang Zhang
Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVD
Advanced Science
AAB‐stacking
graphene
hBN
in situ CVD
van der Waals heterostructures
title Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVD
title_full Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVD
title_fullStr Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVD
title_full_unstemmed Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVD
title_short Synthesis of AAB‐Stacked Single‐Crystal Graphene/hBN/Graphene Trilayer van der Waals Heterostructures by In Situ CVD
title_sort synthesis of aab stacked single crystal graphene hbn graphene trilayer van der waals heterostructures by in situ cvd
topic AAB‐stacking
graphene
hBN
in situ CVD
van der Waals heterostructures
url https://doi.org/10.1002/advs.202201324
work_keys_str_mv AT botian synthesisofaabstackedsinglecrystalgraphenehbngraphenetrilayervanderwaalsheterostructuresbyinsitucvd
AT junzhuli synthesisofaabstackedsinglecrystalgraphenehbngraphenetrilayervanderwaalsheterostructuresbyinsitucvd
AT mingguangchen synthesisofaabstackedsinglecrystalgraphenehbngraphenetrilayervanderwaalsheterostructuresbyinsitucvd
AT haocongdong synthesisofaabstackedsinglecrystalgraphenehbngraphenetrilayervanderwaalsheterostructuresbyinsitucvd
AT xixiangzhang synthesisofaabstackedsinglecrystalgraphenehbngraphenetrilayervanderwaalsheterostructuresbyinsitucvd