Progress in Amorphous Transparent Conducting Oxide Thin Films

With the increasing wide application of organic or polymer substrates, amorphous transparent conducting oxides (a-TCOs) had been widely applied to thin-film transistors, polymer/organic solar cells, electrochromic devices, electromagnetic shielding and other areas due to the combined transparency an...

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Main Authors: ZHANG Xiaofeng, YAN Yue, CHEN Mu, LIU Hongyan, HAO Changshan, ZHANG Guanli
Format: Article
Language:zho
Published: Journal of Aeronautical Materials 2018-02-01
Series:Journal of Aeronautical Materials
Subjects:
Online Access:http://jam.biam.ac.cn/CN/Y2018/V38/I1/1
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author ZHANG Xiaofeng
YAN Yue
CHEN Mu
LIU Hongyan
HAO Changshan
ZHANG Guanli
author_facet ZHANG Xiaofeng
YAN Yue
CHEN Mu
LIU Hongyan
HAO Changshan
ZHANG Guanli
author_sort ZHANG Xiaofeng
collection DOAJ
description With the increasing wide application of organic or polymer substrates, amorphous transparent conducting oxides (a-TCOs) had been widely applied to thin-film transistors, polymer/organic solar cells, electrochromic devices, electromagnetic shielding and other areas due to the combined transparency and conductivity as well as stable properties, processing compatibilities with current technologies and free of post-annealing. A-TCOs films were not the amorphous counterpart of crystalline TCOs but prepared with special elements under certain conditions. After the brief introduction to the working principle of TCO, the even general amorphous transparent semiconducting oxide was addressed intensively. It was worth to note that compared with c-TCOs and classic silicon, the features of electronic structure of a-TCOs were the cations with special configuration (<i>n</i>-1)d<sup>10</sup><i>n</i>s<sup>0</sup>. The stable amorphous structure and excellent properties can be conserved due to larger overlap integral between the adjacent atoms, high mobility and robustness. Particularly, the near range structure characterization such as the medium range order, band structure described by density of states and the metastability of amorphous structure and the related properties were introduced as well. Afterwards, the properties and features of N-type and P-type a-TCOs were exampled in details, especially the indium-based systems, such as excellent a-In-Zn-O films. Less example of P-type a-TCOs were shown as no general principle had been formed for that. Finally, many state-of-art applications including thin-film transistor are introduced. Based upon the current status and emerging trend, three potential research perspective directions of a-TCO have been delivered:(1) to further investigate non-indium based a-TCO; (2) to develop on the P-type TCO with novel principle and material systems; (3) to enable the alternative application that occupied by conventional silicon previously.
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spelling doaj.art-e4806de2a6db41969f8e5fcddd9f882c2022-12-21T23:44:47ZzhoJournal of Aeronautical MaterialsJournal of Aeronautical Materials1005-50531005-50532018-02-0138111610.11868/j.issn.1005-5053.2017.000042201801000042Progress in Amorphous Transparent Conducting Oxide Thin FilmsZHANG Xiaofeng0YAN Yue1CHEN Mu2LIU Hongyan3HAO Changshan4ZHANG Guanli5AECC Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaAECC Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaAECC Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaAECC Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaAECC Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaAECC Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaWith the increasing wide application of organic or polymer substrates, amorphous transparent conducting oxides (a-TCOs) had been widely applied to thin-film transistors, polymer/organic solar cells, electrochromic devices, electromagnetic shielding and other areas due to the combined transparency and conductivity as well as stable properties, processing compatibilities with current technologies and free of post-annealing. A-TCOs films were not the amorphous counterpart of crystalline TCOs but prepared with special elements under certain conditions. After the brief introduction to the working principle of TCO, the even general amorphous transparent semiconducting oxide was addressed intensively. It was worth to note that compared with c-TCOs and classic silicon, the features of electronic structure of a-TCOs were the cations with special configuration (<i>n</i>-1)d<sup>10</sup><i>n</i>s<sup>0</sup>. The stable amorphous structure and excellent properties can be conserved due to larger overlap integral between the adjacent atoms, high mobility and robustness. Particularly, the near range structure characterization such as the medium range order, band structure described by density of states and the metastability of amorphous structure and the related properties were introduced as well. Afterwards, the properties and features of N-type and P-type a-TCOs were exampled in details, especially the indium-based systems, such as excellent a-In-Zn-O films. Less example of P-type a-TCOs were shown as no general principle had been formed for that. Finally, many state-of-art applications including thin-film transistor are introduced. Based upon the current status and emerging trend, three potential research perspective directions of a-TCO have been delivered:(1) to further investigate non-indium based a-TCO; (2) to develop on the P-type TCO with novel principle and material systems; (3) to enable the alternative application that occupied by conventional silicon previously.http://jam.biam.ac.cn/CN/Y2018/V38/I1/1thin filmsamorphoustransparent conducting oxidesstabilityindium oxide
spellingShingle ZHANG Xiaofeng
YAN Yue
CHEN Mu
LIU Hongyan
HAO Changshan
ZHANG Guanli
Progress in Amorphous Transparent Conducting Oxide Thin Films
Journal of Aeronautical Materials
thin films
amorphous
transparent conducting oxides
stability
indium oxide
title Progress in Amorphous Transparent Conducting Oxide Thin Films
title_full Progress in Amorphous Transparent Conducting Oxide Thin Films
title_fullStr Progress in Amorphous Transparent Conducting Oxide Thin Films
title_full_unstemmed Progress in Amorphous Transparent Conducting Oxide Thin Films
title_short Progress in Amorphous Transparent Conducting Oxide Thin Films
title_sort progress in amorphous transparent conducting oxide thin films
topic thin films
amorphous
transparent conducting oxides
stability
indium oxide
url http://jam.biam.ac.cn/CN/Y2018/V38/I1/1
work_keys_str_mv AT zhangxiaofeng progressinamorphoustransparentconductingoxidethinfilms
AT yanyue progressinamorphoustransparentconductingoxidethinfilms
AT chenmu progressinamorphoustransparentconductingoxidethinfilms
AT liuhongyan progressinamorphoustransparentconductingoxidethinfilms
AT haochangshan progressinamorphoustransparentconductingoxidethinfilms
AT zhangguanli progressinamorphoustransparentconductingoxidethinfilms