On the Oxygen Transport Mechanism in Titanium Thin Films under Irradiation by Molecular Water Ions

On the Oxygen Transport Mechanism in Titanium Thin Films under Irradiation by Molecular Water Ions

<p>The behavior of oxygen atoms in (0.5<sub> </sub>–<sub> </sub>1.0) mm thick Ti films is investigated under high-flux, low-energy molecular water ion irradiation. The anomalously deep penetration of oxygen without formation of new compounds observable by XRD has been r...

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Bibliographic Details
Main Authors: Simona TUČKUTĖ, Liudas PRANEVIČIUS, Liudvikas PRANEVIČIUS, Marius URBONAVIČIUS
Format: Article
Language:English
Published: Kaunas University of Technology 2013-03-01
Series:Medžiagotyra
Subjects:
hydrogen
water vapor
plasma
ion implantation
Online Access:http://matsc.ktu.lt/index.php/MatSc/article/view/3822

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