The mercury microprobe for investigation of local electrophysical properties of semiconductor structures
The construction of mercury microprobe has been proposed for measurement of electrophysical characteristics of semiconductor materials and IS(MIS) structures with 5—25 micron locality. Local electrophysical properties of technological Si–SiO2 structures with thin oxides in the region of electrically...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2010-02-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2010/1_2010/pdf/10.zip |