Material Removal Capability and Profile Quality Assessment on Silicon Carbide Micropillar Fabrication with a Femtosecond Laser

Silicon carbide (SiC) has a variety of applications because of its favorable chemical stability and outstanding physical characteristics, such as high hardness and high rigidity. In this study, a femtosecond laser with a spiral scanning radial offset of 5 μm and a spot radius of 6 μm is utilized to...

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Bibliographic Details
Main Authors:	Xifang Zhang, Zhibao Hou, Jiacheng Song, Zhiyi Jin, Zhenqiang Yao
Format:	Article
Language:	English
Published:	MDPI AG 2022-12-01
Series:	Materials
Subjects:	silicon carbide (SiC) femtosecond laser micropillars profile quality material removal capability (MRC)
Online Access:	https://www.mdpi.com/1996-1944/16/1/244

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