A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect
Capacitive displacement transducers (CDTs) have been widely used in many physical sensors, attributing to high-resolution, simple electricity and easy manufacturing process. Gap-variation CDTs generally have higher displacement resolution due to small electrode gaps but suffer from the pull-in effec...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
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IEEE
2019-01-01
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| Series: | IEEE Access |
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| Online Access: | https://ieeexplore.ieee.org/document/8873587/ |
| _version_ | 1819171271030603776 |
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| author | Qiu Wang Shitao Yan Qiangwei Xu Shaolin Zhang Xiaoxiao Song Chun Zhao Fangjing Hu Huafeng Liu Liangcheng Tu |
| author_facet | Qiu Wang Shitao Yan Qiangwei Xu Shaolin Zhang Xiaoxiao Song Chun Zhao Fangjing Hu Huafeng Liu Liangcheng Tu |
| author_sort | Qiu Wang |
| collection | DOAJ |
| description | Capacitive displacement transducers (CDTs) have been widely used in many physical sensors, attributing to high-resolution, simple electricity and easy manufacturing process. Gap-variation CDTs generally have higher displacement resolution due to small electrode gaps but suffer from the pull-in effect, the nonlinear effect and squeeze-film damping; whereas area-variation CDTs have intrinsically good linearity and much smaller slide-film damping. However, the parallel-plate-based area-variation CDTs have the electrode width much larger than the electrode gap with negligible fringe effect; therefore, the sensitivity is limited by periodic electrode numbers. In this paper, we introduce a novel fringe-effect dominated area-variation CDT with a much higher sensitivity within a certain electrode-deployable area. Both theoretical and numerical analysis are applied to investigate the working principle of the CDT design. The proposed fringe-effect-based CDT benefits from a much larger capacitance-to-displacement sensitivity than the traditional periodic array parallel-plate-based CDT, due to the more displacement-sensitive fringe field and more deployable electrode periods. A set of experiments are designed, and the proposed area-variation CDTs are evaluated. Experimental results suggested that the proposed CDT design, which had equal electrode width, separation and gap, could universally be applied to sensors with different featured dimensions either in macroscale or microscale. Angular misalignments with both out-of-plane tilts and in-plane rotations, which affect the output offset and sensitivity, should be minimized or alleviated. The proposed fringe-effect-based CDT are successfully applied to a single-axis in-plane sensing micro-electromechanical systems (MEMS) accelerometer, showing a noise floor as low as 0.25 ng/Hz<sup>1/2</sup>@1 Hz. The corresponding displacement noise of the proposed CDT is 0.1 pm/Hz<sup>1/2</sup>. |
| first_indexed | 2024-12-22T19:48:38Z |
| format | Article |
| id | doaj.art-e509895378704b8284e72d55520f096c |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-12-22T19:48:38Z |
| publishDate | 2019-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-e509895378704b8284e72d55520f096c2022-12-21T18:14:37ZengIEEEIEEE Access2169-35362019-01-01715365015365910.1109/ACCESS.2019.29475708873587A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe EffectQiu Wang0https://orcid.org/0000-0002-6324-872XShitao Yan1Qiangwei Xu2Shaolin Zhang3Xiaoxiao Song4Chun Zhao5Fangjing Hu6Huafeng Liu7https://orcid.org/0000-0003-0757-2362Liangcheng Tu8MOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaMOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, ChinaCapacitive displacement transducers (CDTs) have been widely used in many physical sensors, attributing to high-resolution, simple electricity and easy manufacturing process. Gap-variation CDTs generally have higher displacement resolution due to small electrode gaps but suffer from the pull-in effect, the nonlinear effect and squeeze-film damping; whereas area-variation CDTs have intrinsically good linearity and much smaller slide-film damping. However, the parallel-plate-based area-variation CDTs have the electrode width much larger than the electrode gap with negligible fringe effect; therefore, the sensitivity is limited by periodic electrode numbers. In this paper, we introduce a novel fringe-effect dominated area-variation CDT with a much higher sensitivity within a certain electrode-deployable area. Both theoretical and numerical analysis are applied to investigate the working principle of the CDT design. The proposed fringe-effect-based CDT benefits from a much larger capacitance-to-displacement sensitivity than the traditional periodic array parallel-plate-based CDT, due to the more displacement-sensitive fringe field and more deployable electrode periods. A set of experiments are designed, and the proposed area-variation CDTs are evaluated. Experimental results suggested that the proposed CDT design, which had equal electrode width, separation and gap, could universally be applied to sensors with different featured dimensions either in macroscale or microscale. Angular misalignments with both out-of-plane tilts and in-plane rotations, which affect the output offset and sensitivity, should be minimized or alleviated. The proposed fringe-effect-based CDT are successfully applied to a single-axis in-plane sensing micro-electromechanical systems (MEMS) accelerometer, showing a noise floor as low as 0.25 ng/Hz<sup>1/2</sup>@1 Hz. The corresponding displacement noise of the proposed CDT is 0.1 pm/Hz<sup>1/2</sup>.https://ieeexplore.ieee.org/document/8873587/Capacitive sensordisplacement transducerfringe effectMEMSaccelerometer |
| spellingShingle | Qiu Wang Shitao Yan Qiangwei Xu Shaolin Zhang Xiaoxiao Song Chun Zhao Fangjing Hu Huafeng Liu Liangcheng Tu A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect IEEE Access Capacitive sensor displacement transducer fringe effect MEMS accelerometer |
| title | A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect |
| title_full | A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect |
| title_fullStr | A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect |
| title_full_unstemmed | A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect |
| title_short | A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect |
| title_sort | universal high sensitivity area variation capacitive displacement transducer cdt based on fringe effect |
| topic | Capacitive sensor displacement transducer fringe effect MEMS accelerometer |
| url | https://ieeexplore.ieee.org/document/8873587/ |
| work_keys_str_mv | AT qiuwang auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT shitaoyan auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT qiangweixu auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT shaolinzhang auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT xiaoxiaosong auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT chunzhao auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT fangjinghu auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT huafengliu auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT liangchengtu auniversalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT qiuwang universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT shitaoyan universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT qiangweixu universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT shaolinzhang universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT xiaoxiaosong universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT chunzhao universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT fangjinghu universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT huafengliu universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect AT liangchengtu universalhighsensitivityareavariationcapacitivedisplacementtransducercdtbasedonfringeeffect |