A Piezoelectric Stick-Slip Nanopositioning Stage With Ultra-High Load Capacity Realizing by Decoupling the Driving and Moving Units
The stick-slip piezoelectric stage plays an important role in micro-operation and industrial applications due to its nanometer resolution. However, under high load, the output performance of the piezoelectric stage will be seriously influenced. In order to overcome this limitation, this paper propos...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8854078/ |