Three-dimensional femtosecond laser processing for lab-on-a-chip applications

The extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce nonlinear interaction such as multiphoton absorption and tunneling ionization with materials that are transparent to the laser wavelength. More importantly, focusing the femtosecond lase...

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Main Authors: Sima Felix, Sugioka Koji, Vázquez Rebeca Martínez, Osellame Roberto, Kelemen Lóránd, Ormos Pal
Format: Article
Language:English
Published: De Gruyter 2018-02-01
Series:Nanophotonics
Subjects:
Online Access:https://doi.org/10.1515/nanoph-2017-0097
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author Sima Felix
Sugioka Koji
Vázquez Rebeca Martínez
Osellame Roberto
Kelemen Lóránd
Ormos Pal
author_facet Sima Felix
Sugioka Koji
Vázquez Rebeca Martínez
Osellame Roberto
Kelemen Lóránd
Ormos Pal
author_sort Sima Felix
collection DOAJ
description The extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce nonlinear interaction such as multiphoton absorption and tunneling ionization with materials that are transparent to the laser wavelength. More importantly, focusing the femtosecond laser beam inside the transparent materials confines the nonlinear interaction only within the focal volume, enabling three-dimensional (3D) micro- and nanofabrication. This 3D capability offers three different schemes, which involve undeformative, subtractive, and additive processing. The undeformative processing preforms internal refractive index modification to construct optical microcomponents including optical waveguides. Subtractive processing can realize the direct fabrication of 3D microfluidics, micromechanics, microelectronics, and photonic microcomponents in glass. Additive processing represented by two-photon polymerization enables the fabrication of 3D polymer micro- and nanostructures for photonic and microfluidic devices. These different schemes can be integrated to realize more functional microdevices including lab-on-a-chip devices, which are miniaturized laboratories that can perform reaction, detection, analysis, separation, and synthesis of biochemical materials with high efficiency, high speed, high sensitivity, low reagent consumption, and low waste production. This review paper describes the principles and applications of femtosecond laser 3D micro- and nanofabrication for lab-on-a-chip applications. A hybrid technique that promises to enhance functionality of lab-on-a-chip devices is also introduced.
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spelling doaj.art-e5964b7a57c14c1b85d53fd258f9b0562022-12-21T21:28:13ZengDe GruyterNanophotonics2192-86062192-86142018-02-017361363410.1515/nanoph-2017-0097nanoph-2017-0097Three-dimensional femtosecond laser processing for lab-on-a-chip applicationsSima Felix0Sugioka Koji1Vázquez Rebeca Martínez2Osellame Roberto3Kelemen Lóránd4Ormos Pal5RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, JapanRIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, JapanIstituto di Fotonica e Nanotecnologie (IFN)-CNR and Dipartimento di Fisica-Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milan, ItalyIstituto di Fotonica e Nanotecnologie (IFN)-CNR and Dipartimento di Fisica-Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milan, ItalyBiological Research Centre, Institute of Biophysics, Hungarian Academy of Sciences, Temesvári krt. 62, 6726 Szeged, HungaryBiological Research Centre, Institute of Biophysics, Hungarian Academy of Sciences, Temesvári krt. 62, 6726 Szeged, HungaryThe extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce nonlinear interaction such as multiphoton absorption and tunneling ionization with materials that are transparent to the laser wavelength. More importantly, focusing the femtosecond laser beam inside the transparent materials confines the nonlinear interaction only within the focal volume, enabling three-dimensional (3D) micro- and nanofabrication. This 3D capability offers three different schemes, which involve undeformative, subtractive, and additive processing. The undeformative processing preforms internal refractive index modification to construct optical microcomponents including optical waveguides. Subtractive processing can realize the direct fabrication of 3D microfluidics, micromechanics, microelectronics, and photonic microcomponents in glass. Additive processing represented by two-photon polymerization enables the fabrication of 3D polymer micro- and nanostructures for photonic and microfluidic devices. These different schemes can be integrated to realize more functional microdevices including lab-on-a-chip devices, which are miniaturized laboratories that can perform reaction, detection, analysis, separation, and synthesis of biochemical materials with high efficiency, high speed, high sensitivity, low reagent consumption, and low waste production. This review paper describes the principles and applications of femtosecond laser 3D micro- and nanofabrication for lab-on-a-chip applications. A hybrid technique that promises to enhance functionality of lab-on-a-chip devices is also introduced.https://doi.org/10.1515/nanoph-2017-0097femtosecond laserslab-on-a-chipsubtractive manufacturingadditive manufacturing3d fabrication
spellingShingle Sima Felix
Sugioka Koji
Vázquez Rebeca Martínez
Osellame Roberto
Kelemen Lóránd
Ormos Pal
Three-dimensional femtosecond laser processing for lab-on-a-chip applications
Nanophotonics
femtosecond lasers
lab-on-a-chip
subtractive manufacturing
additive manufacturing
3d fabrication
title Three-dimensional femtosecond laser processing for lab-on-a-chip applications
title_full Three-dimensional femtosecond laser processing for lab-on-a-chip applications
title_fullStr Three-dimensional femtosecond laser processing for lab-on-a-chip applications
title_full_unstemmed Three-dimensional femtosecond laser processing for lab-on-a-chip applications
title_short Three-dimensional femtosecond laser processing for lab-on-a-chip applications
title_sort three dimensional femtosecond laser processing for lab on a chip applications
topic femtosecond lasers
lab-on-a-chip
subtractive manufacturing
additive manufacturing
3d fabrication
url https://doi.org/10.1515/nanoph-2017-0097
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