2D Dielectric Nanoimprinted PMMA Pillars on Metallo-Dielectric Films

2D Dielectric Nanoimprinted PMMA Pillars on Metallo-Dielectric Films

In this work, we propose an optimized nanoimprint protocol for the fabrication of a two-dimensional (2D) array of polymethyl-methacrylate (PMMA) nano-pillars deposited on different sputtered configurations (bilayer and multi-layer) of copper (Cu) and aluminum nitride (AlN) slabs supported by a silic...

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Bibliographic Details
Main Authors: Tiziana Stomeo, Armando Casolino, Francesco Guido, Antonio Qualtieri, Michael Scalora, Antonella D’Orazio, Massimo De Vittorio, Marco Grande
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Applied Sciences
Subjects:
NIL
thin films deposition
optical absorbers
diffraction grating
guided-mode resonance
Online Access:https://www.mdpi.com/2076-3417/9/18/3812

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