Large-Scale and Localized Laser Crystallization of Optically Thick Amorphous Silicon Films by Near-IR Femtosecond Pulses

Large-Scale and Localized Laser Crystallization of Optically Thick Amorphous Silicon Films by Near-IR Femtosecond Pulses

Amorphous silicon (<inline-formula><math display="inline"><semantics><mi>α</mi></semantics></math></inline-formula>-Si) film present an inexpensive and promising material for optoelectronic and nanophotonic applications. Its basic optical and...

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Bibliographic Details
Main Authors: Kirill Bronnikov, Alexander Dostovalov, Artem Cherepakhin, Eugeny Mitsai, Alexander Nepomniaschiy, Sergei A. Kulinich, Alexey Zhizhchenko, Aleksandr Kuchmizhak
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Materials
Subjects:
amorphous silicon
polycrystalline silicon
thin films
laser-induced annealing
femtosecond laser pulses
Raman spectroscopy
Online Access:https://www.mdpi.com/1996-1944/13/22/5296

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