Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet

In this paper, the failure mechanisms of the thermal inkjet thin-film resistors are recognized. Additionally, designs of resistors to overcome these mechanisms are suggested and tested by simulation and experiment. The resulting resistors are shown to have improved lifetimes, spanning an order of ma...

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Main Authors: Elkana Bar-Levav, Moshe Witman, Moshe Einat
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/5/499
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author Elkana Bar-Levav
Moshe Witman
Moshe Einat
author_facet Elkana Bar-Levav
Moshe Witman
Moshe Einat
author_sort Elkana Bar-Levav
collection DOAJ
description In this paper, the failure mechanisms of the thermal inkjet thin-film resistors are recognized. Additionally, designs of resistors to overcome these mechanisms are suggested and tested by simulation and experiment. The resulting resistors are shown to have improved lifetimes, spanning an order of magnitude up to 2 × 10<sup>9</sup> pulses. The thermal failure mechanisms were defined according to the electric field magnitude in three critical points—the resistor center, the resistor–conductor edge, and the resistor thermal “hot spots”. Lowering the thermal gradients between these points will lead to the improved lifetime of the resistors. Using MATLAB PDE simulations, various resistors shapes, with different electric field ratios in the hot spots, were designed and manufactured on an 8″ silicon wafer. A series of lifetime experiments were conducted on the resistors, and a strong relation between the shape and the lifetime of the resistor was found. These results have immediate ramifications regarding the different printing apparatuses which function with thermal inkjet technology, allowing the commercial production of larger thermal printheads with high MTBF rate. Such heads may fit fast and large 3D printers.
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spelling doaj.art-e69b2a4ecca641e1b195efa9b18f94ad2023-11-20T00:31:20ZengMDPI AGMicromachines2072-666X2020-05-0111549910.3390/mi11050499Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal InkjetElkana Bar-Levav0Moshe Witman1Moshe Einat2Department of Electrical and Electronic Engineering, Ariel University, Ariel 4070000, IsraelDepartment of Electrical and Electronic Engineering, Ariel University, Ariel 4070000, IsraelDepartment of Electrical and Electronic Engineering, Ariel University, Ariel 4070000, IsraelIn this paper, the failure mechanisms of the thermal inkjet thin-film resistors are recognized. Additionally, designs of resistors to overcome these mechanisms are suggested and tested by simulation and experiment. The resulting resistors are shown to have improved lifetimes, spanning an order of magnitude up to 2 × 10<sup>9</sup> pulses. The thermal failure mechanisms were defined according to the electric field magnitude in three critical points—the resistor center, the resistor–conductor edge, and the resistor thermal “hot spots”. Lowering the thermal gradients between these points will lead to the improved lifetime of the resistors. Using MATLAB PDE simulations, various resistors shapes, with different electric field ratios in the hot spots, were designed and manufactured on an 8″ silicon wafer. A series of lifetime experiments were conducted on the resistors, and a strong relation between the shape and the lifetime of the resistor was found. These results have immediate ramifications regarding the different printing apparatuses which function with thermal inkjet technology, allowing the commercial production of larger thermal printheads with high MTBF rate. Such heads may fit fast and large 3D printers.https://www.mdpi.com/2072-666X/11/5/4992D printhead3D printingthermal inkjetthin-film resistors
spellingShingle Elkana Bar-Levav
Moshe Witman
Moshe Einat
Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet
Micromachines
2D printhead
3D printing
thermal inkjet
thin-film resistors
title Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet
title_full Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet
title_fullStr Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet
title_full_unstemmed Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet
title_short Thin-Film MEMS Resistors with Enhanced Lifetime for Thermal Inkjet
title_sort thin film mems resistors with enhanced lifetime for thermal inkjet
topic 2D printhead
3D printing
thermal inkjet
thin-film resistors
url https://www.mdpi.com/2072-666X/11/5/499
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