Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge

In this study, ZnO/ZnAl2O4/Zn2TiO4 composite nanostructured thin films are deposited assisted with hollow-cathode glow discharge (HCD). The films are deposited using various argon-oxygen gases mixture (0–50% O2), and its effect on film quality, optical and electrical properties is examined. Remarkab...

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Main Authors: J.C.A. de Queiroz, M. Naeem, J.B.A. Filho, M.S. Libório, M.G.O. Queiroz, R.R.M. Sousa, E.B. Melo, Michelle Feitor, T.H.C. Costa
Format: Article
Language:English
Published: Elsevier 2021-05-01
Series:Journal of Materials Research and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785421003707
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author J.C.A. de Queiroz
M. Naeem
J.B.A. Filho
M.S. Libório
M.G.O. Queiroz
R.R.M. Sousa
E.B. Melo
Michelle Feitor
T.H.C. Costa
author_facet J.C.A. de Queiroz
M. Naeem
J.B.A. Filho
M.S. Libório
M.G.O. Queiroz
R.R.M. Sousa
E.B. Melo
Michelle Feitor
T.H.C. Costa
author_sort J.C.A. de Queiroz
collection DOAJ
description In this study, ZnO/ZnAl2O4/Zn2TiO4 composite nanostructured thin films are deposited assisted with hollow-cathode glow discharge (HCD). The films are deposited using various argon-oxygen gases mixture (0–50% O2), and its effect on film quality, optical and electrical properties is examined. Remarkably, instead of metallic targets, ZnO, TiO2, and Al2O3 powders filled in hollow-cathode are used for deposition, and thus no specific metallic targets are required in this technique. The deposited films consist of hexagonal wurtzite ZnO structure, ZnAl2O4, and Zn2TiO4 phases, and the crystalline size of films increases for higher oxygen contents. The thickness of films reduced by increasing oxygen contents, and all deposited films exhibit transmittance higher than 82%. The carrier concentration and mobility increase, whereas resistivity decreases when a higher amount of oxygen is added. This study shows that HCD can effectively synthesize the composite film with good optical and electrical properties. Additionally, the film's properties and elemental composition can be tuned by changing the gas composition, and thus, no separate target metallic materials with the specific composition are required.
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spelling doaj.art-e6a12fa6444b4ad0826c28b566992d342022-12-21T18:51:51ZengElsevierJournal of Materials Research and Technology2238-78542021-05-011224262437Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow dischargeJ.C.A. de Queiroz0M. Naeem1J.B.A. Filho2M.S. Libório3M.G.O. Queiroz4R.R.M. Sousa5E.B. Melo6Michelle Feitor7T.H.C. Costa8Mechanical Engineering Department, Federal University of Rio Grande Do Norte, University Campus, Natal, RN, BrazilDepartment of Physics, Women University of Azad Jammu and Kashmir, Bagh, Pakistan; Corresponding author.Institute of Chemistry, Federal University of Rio Grande Do Norte, University Campus, Natal, RN, BrazilSchool of Science and Technology, Federal University of Rio Grande Do Norte, University Campus, Natal, RN, BrazilMultidisciplinary Center, Federal Rural University of the Semi-Arid, Pau Dos Ferros, RN, BrazilMaterials Engineering Department, Federal University of Piauí, Campus Minister Reis Velloso, Teresina, PI, BrazilFederal Institute of Education Science and Technology of São Paulo, São Paulo, SP, BrazilDepartamento de Engenharia Téxtil, UFRN, Natal, BrazilMechanical Engineering Department, Federal University of Rio Grande Do Norte, University Campus, Natal, RN, BrazilIn this study, ZnO/ZnAl2O4/Zn2TiO4 composite nanostructured thin films are deposited assisted with hollow-cathode glow discharge (HCD). The films are deposited using various argon-oxygen gases mixture (0–50% O2), and its effect on film quality, optical and electrical properties is examined. Remarkably, instead of metallic targets, ZnO, TiO2, and Al2O3 powders filled in hollow-cathode are used for deposition, and thus no specific metallic targets are required in this technique. The deposited films consist of hexagonal wurtzite ZnO structure, ZnAl2O4, and Zn2TiO4 phases, and the crystalline size of films increases for higher oxygen contents. The thickness of films reduced by increasing oxygen contents, and all deposited films exhibit transmittance higher than 82%. The carrier concentration and mobility increase, whereas resistivity decreases when a higher amount of oxygen is added. This study shows that HCD can effectively synthesize the composite film with good optical and electrical properties. Additionally, the film's properties and elemental composition can be tuned by changing the gas composition, and thus, no separate target metallic materials with the specific composition are required.http://www.sciencedirect.com/science/article/pii/S2238785421003707ZnO filmHollow-cathode glow dischargeElectrical propertiesOptical propertiesBand-gap
spellingShingle J.C.A. de Queiroz
M. Naeem
J.B.A. Filho
M.S. Libório
M.G.O. Queiroz
R.R.M. Sousa
E.B. Melo
Michelle Feitor
T.H.C. Costa
Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge
Journal of Materials Research and Technology
ZnO film
Hollow-cathode glow discharge
Electrical properties
Optical properties
Band-gap
title Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge
title_full Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge
title_fullStr Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge
title_full_unstemmed Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge
title_short Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge
title_sort synthesis and characterization of zno znal2o4 zn2tio4 composite films by ar o2 mixture hollow cathode glow discharge
topic ZnO film
Hollow-cathode glow discharge
Electrical properties
Optical properties
Band-gap
url http://www.sciencedirect.com/science/article/pii/S2238785421003707
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