Comparative study of the ion-slicing mechanism of Y-cut LiNbO3

Comparative study of the ion-slicing mechanism of Y-cut LiNbO3

Ion-cutting of piezoelectric LiNbO3 (LN) thin film provides a material platform for the design and fabrication of novel integrated photonics and RF MEMS devices. In this paper, the ion-slicing mechanisms of He-implanted LN with different orientations are investigated. The anisotropy of film exfoliat...

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Bibliographic Details
Main Authors: Kai Huang, Zhongxu Li, Youquan Yan, Xiaomeng Zhao, Wenqin Li, Tiangui You, Shibin Zhang, Hongyan Zhou, Jiajie Lin, Wenhui Xu, Ailun Yi, Hao Huang, Min Zhou, Wenjie Yu, Junyu Xie, Xiaobin Zeng, Renjie Liu, Xin Ou
Format: Article
Language:English
Published: AIP Publishing LLC 2019-08-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5112792

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