Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array

Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array

This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging. A polyimide layer is used as the passive layer in t...

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Bibliographic Details
Main Authors: Sanjog Vilas Joshi, Sina Sadeghpour, Michael Kraft
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Sensors
Subjects:
piezoelectric thin films
PZT
piezo-mems
ultrasound transducers
PMUT
medical imaging
Online Access:https://www.mdpi.com/1424-8220/23/10/4826

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