High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method
Polycrystalline Pb(Zr0.52Ti0.48)O3 (PZT) microtubes are fabricated by a vacuum infiltration method. The method is based on repeated infiltration of precursor solution into macroporous silicon (Si) templates at a sub-atmospheric pressure. The pyrolyzed PZT tubes of a 2-µm outer diameter, extending to...
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| Format: | Article |
| Language: | English |
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University of Novi Sad
2012-03-01
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| Series: | Processing and Application of Ceramics |
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| Online Access: | http://tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2015%2004.pdf |
| _version_ | 1819074537541599232 |
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| author | Vladimír Kovaľ |
| author_facet | Vladimír Kovaľ |
| author_sort | Vladimír Kovaľ |
| collection | DOAJ |
| description | Polycrystalline Pb(Zr0.52Ti0.48)O3 (PZT) microtubes are fabricated by a vacuum infiltration method. The method is based on repeated infiltration of precursor solution into macroporous silicon (Si) templates at a sub-atmospheric pressure. The pyrolyzed PZT tubes of a 2-µm outer diameter, extending to over 30 µm in length were released from the template using a selective isotropic-pulsed XeF2 reactive ion etching of silicon. Free-standing microtubes, partially anchored at the bottom of the Si template, were then crystallized in pure oxygen atmosphere at 750 °C for 2 min using a rapid thermal annealer. The perovskite phase of the final PZT tubes was confirmed by X-ray diffraction (XRD) analysis. The XRD spectrum also revealed a small amount of the pyrochlore phase in the structure and signs of possible fluoride contamination caused most likely by the XeF2 etching process. The surface morphology was examined using scanning electron microscopy. It was demonstrated that the whole surface of the pore walls was conformally coated during the repeated infiltration of templates, resulting in straight tubes with closed tips formed on the opposite ends as replicas of the pore bottoms. These high aspect ratio ferroelectric structures are suggested as building units for developing miniaturized electronic devices, such as memory storage (DRAM trenched) capacitors, piezoelectric scanners and actuators, and are of fundamental value for the theory of ferroelectricity in systems with low dimensionality. |
| first_indexed | 2024-12-21T18:11:06Z |
| format | Article |
| id | doaj.art-e722a518c3194f4e8efec3e4abfdfa8b |
| institution | Directory Open Access Journal |
| issn | 1820-6131 |
| language | English |
| last_indexed | 2024-12-21T18:11:06Z |
| publishDate | 2012-03-01 |
| publisher | University of Novi Sad |
| record_format | Article |
| series | Processing and Application of Ceramics |
| spelling | doaj.art-e722a518c3194f4e8efec3e4abfdfa8b2022-12-21T18:54:47ZengUniversity of Novi SadProcessing and Application of Ceramics1820-61312012-03-01613742High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration methodVladimír KovaľPolycrystalline Pb(Zr0.52Ti0.48)O3 (PZT) microtubes are fabricated by a vacuum infiltration method. The method is based on repeated infiltration of precursor solution into macroporous silicon (Si) templates at a sub-atmospheric pressure. The pyrolyzed PZT tubes of a 2-µm outer diameter, extending to over 30 µm in length were released from the template using a selective isotropic-pulsed XeF2 reactive ion etching of silicon. Free-standing microtubes, partially anchored at the bottom of the Si template, were then crystallized in pure oxygen atmosphere at 750 °C for 2 min using a rapid thermal annealer. The perovskite phase of the final PZT tubes was confirmed by X-ray diffraction (XRD) analysis. The XRD spectrum also revealed a small amount of the pyrochlore phase in the structure and signs of possible fluoride contamination caused most likely by the XeF2 etching process. The surface morphology was examined using scanning electron microscopy. It was demonstrated that the whole surface of the pore walls was conformally coated during the repeated infiltration of templates, resulting in straight tubes with closed tips formed on the opposite ends as replicas of the pore bottoms. These high aspect ratio ferroelectric structures are suggested as building units for developing miniaturized electronic devices, such as memory storage (DRAM trenched) capacitors, piezoelectric scanners and actuators, and are of fundamental value for the theory of ferroelectricity in systems with low dimensionality.http://tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2015%2004.pdfLead zirconate titanateMicrotubesTemplate assisted methodVacuum infiltration |
| spellingShingle | Vladimír Kovaľ High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method Processing and Application of Ceramics Lead zirconate titanate Microtubes Template assisted method Vacuum infiltration |
| title | High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method |
| title_full | High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method |
| title_fullStr | High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method |
| title_full_unstemmed | High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method |
| title_short | High aspect ratio lead zirconate titanate tube structures: I. Template assisted fabrication - vacuum infiltration method |
| title_sort | high aspect ratio lead zirconate titanate tube structures i template assisted fabrication vacuum infiltration method |
| topic | Lead zirconate titanate Microtubes Template assisted method Vacuum infiltration |
| url | http://tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2015%2004.pdf |
| work_keys_str_mv | AT vladimirkoval highaspectratioleadzirconatetitanatetubestructuresitemplateassistedfabricationvacuuminfiltrationmethod |