Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics
Speckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
International Union of Crystallography
2022-11-01
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| Series: | Journal of Synchrotron Radiation |
| Subjects: | |
| Online Access: | http://scripts.iucr.org/cgi-bin/paper?S160057752200916X |
| _version_ | 1818469925690277888 |
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| author | Lingfei Hu Hongchang Wang Oliver Fox Kawal Sawhney |
| author_facet | Lingfei Hu Hongchang Wang Oliver Fox Kawal Sawhney |
| author_sort | Lingfei Hu |
| collection | DOAJ |
| description | Speckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1D information typically output from speckled-based methods, a 2D map is more informative for understanding the overall quality of the optic being tested. In this paper, we propose a method for in situ 2D absolute metrology of weakly focusing X-ray mirrors. Importantly, the angular misalignment of the mirror can be easily corrected with the proposed 2D processing procedure. We hope the speckle pattern data processing method presented here will help to extend this technique to wider applications in the synchrotron radiation and X-ray free-electron laser communities. |
| first_indexed | 2024-04-13T21:31:05Z |
| format | Article |
| id | doaj.art-e742f3337b5c4bbcabe557cb771529af |
| institution | Directory Open Access Journal |
| issn | 1600-5775 |
| language | English |
| last_indexed | 2024-04-13T21:31:05Z |
| publishDate | 2022-11-01 |
| publisher | International Union of Crystallography |
| record_format | Article |
| series | Journal of Synchrotron Radiation |
| spelling | doaj.art-e742f3337b5c4bbcabe557cb771529af2022-12-22T02:29:10ZengInternational Union of CrystallographyJournal of Synchrotron Radiation1600-57752022-11-012961385139310.1107/S160057752200916Xmo5257Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray opticsLingfei Hu0Hongchang Wang1Oliver Fox2Kawal Sawhney3Diamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United KingdomDiamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United KingdomDiamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United KingdomDiamond Light Source Ltd, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United KingdomSpeckle-based at-wavelength metrology techniques now play an important role in X-ray wavefront measurements. However, for reflective X-ray optics, the majority of existing speckle-based methods fail to provide reliable 2D information about the optical surface being characterized. Compared with the 1D information typically output from speckled-based methods, a 2D map is more informative for understanding the overall quality of the optic being tested. In this paper, we propose a method for in situ 2D absolute metrology of weakly focusing X-ray mirrors. Importantly, the angular misalignment of the mirror can be easily corrected with the proposed 2D processing procedure. We hope the speckle pattern data processing method presented here will help to extend this technique to wider applications in the synchrotron radiation and X-ray free-electron laser communities.http://scripts.iucr.org/cgi-bin/paper?S160057752200916Xspeckle techniquex-ray opticsat-wavelength metrology |
| spellingShingle | Lingfei Hu Hongchang Wang Oliver Fox Kawal Sawhney Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics Journal of Synchrotron Radiation speckle technique x-ray optics at-wavelength metrology |
| title | Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics |
| title_full | Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics |
| title_fullStr | Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics |
| title_full_unstemmed | Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics |
| title_short | Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics |
| title_sort | two dimensional speckle technique for slope error measurements of weakly focusing reflective x ray optics |
| topic | speckle technique x-ray optics at-wavelength metrology |
| url | http://scripts.iucr.org/cgi-bin/paper?S160057752200916X |
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