ITO film stack engineering for low-loss silicon optical modulators

ITO film stack engineering for low-loss silicon optical modulators

Abstract The Indium Tin Oxide (ITO) platform is one of the promising solutions for state-of-the-art integrated optical modulators towards low-loss silicon photonics applications. One of the key challenges on this way is to optimize ITO-based thin films stacks for electro-optic modulators with both h...

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Bibliographic Details
Main Authors: Evgeniy S. Lotkov, Aleksandr S. Baburin, Ilya A. Ryzhikov, Olga S. Sorokina, Anton I. Ivanov, Alexander V. Zverev, Vitaly V. Ryzhkov, Igor V. Bykov, Alexander V. Baryshev, Yuri V. Panfilov, Ilya A. Rodionov
Format: Article
Language:English
Published: Nature Portfolio 2022-04-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-022-09973-5

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