An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method
This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, t...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2007-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/7/5/697/ |
| _version_ | 1798038805986410496 |
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| author | Bong-Cheol Shin Myeong-Woo Cho Dae-Jin Yun Dong-Sam Park |
| author_facet | Bong-Cheol Shin Myeong-Woo Cho Dae-Jin Yun Dong-Sam Park |
| author_sort | Bong-Cheol Shin |
| collection | DOAJ |
| description | This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyrex and the soda lime glasses were examined. From the experimental results, optimal blasting conditions were selected for the Pyrex glass machining. The dimensions of the designed glass sensor was 1.7×1.7×0.6mm for the vibrating mass, and 2.9×0.7×0.2mm for the cantilever beam. The machining results showed that the dimensional errors of the machined glass sensor ranged from 3 μm in minimum to 20 μm in maximum. These results imply that the micro powder blasting method can be applied for the micromachining of glass-based acceleration sensors to replace the exiting method. |
| first_indexed | 2024-04-11T21:45:23Z |
| format | Article |
| id | doaj.art-e7b89fb986714d99a8db6c9d6bffeb75 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T21:45:23Z |
| publishDate | 2007-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-e7b89fb986714d99a8db6c9d6bffeb752022-12-22T04:01:26ZengMDPI AGSensors1424-82202007-05-017569770710.3390/s7050697An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting MethodBong-Cheol ShinMyeong-Woo ChoDae-Jin YunDong-Sam ParkThis study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyrex and the soda lime glasses were examined. From the experimental results, optimal blasting conditions were selected for the Pyrex glass machining. The dimensions of the designed glass sensor was 1.7×1.7×0.6mm for the vibrating mass, and 2.9×0.7×0.2mm for the cantilever beam. The machining results showed that the dimensional errors of the machined glass sensor ranged from 3 μm in minimum to 20 μm in maximum. These results imply that the micro powder blasting method can be applied for the micromachining of glass-based acceleration sensors to replace the exiting method.http://www.mdpi.com/1424-8220/7/5/697/Acceleration sensormicro powder blastingmicromachiningmaskingetching. |
| spellingShingle | Bong-Cheol Shin Myeong-Woo Cho Dae-Jin Yun Dong-Sam Park An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method Sensors Acceleration sensor micro powder blasting micromachining masking etching. |
| title | An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method |
| title_full | An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method |
| title_fullStr | An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method |
| title_full_unstemmed | An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method |
| title_short | An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method |
| title_sort | experimental study on the fabrication of glass based acceleration sensor body using micro powder blasting method |
| topic | Acceleration sensor micro powder blasting micromachining masking etching. |
| url | http://www.mdpi.com/1424-8220/7/5/697/ |
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