An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method

An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method

This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, t...

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Bibliographic Details
Main Authors: Bong-Cheol Shin, Myeong-Woo Cho, Dae-Jin Yun, Dong-Sam Park
Format: Article
Language:English
Published: MDPI AG 2007-05-01
Series:Sensors
Subjects:
Acceleration sensor
micro powder blasting
micromachining
masking
etching.
Online Access:http://www.mdpi.com/1424-8220/7/5/697/

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