Design and Fabrication Technology of Low Profile Tactile Sensor with Digital Interface for Whole Body Robot Skin

Covering a whole surface of a robot with tiny sensors which can measure local pressure and transmit the data through a network is an ideal solution to give an artificial skin to robots to improve a capability of action and safety. The crucial technological barrier is to package force sensor and comm...

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Bibliographic Details
Main Authors:	Mitsutoshi Makihata, Masanori Muroyama, Shuji Tanaka, Takahiro Nakayama, Yutaka Nonomura, Masayoshi Esashi
Format:	Article
Language:	English
Published:	MDPI AG 2018-07-01
Series:	Sensors
Subjects:	tactile sensor MEMS-CMOS integration wafer level packaging sensor network through silicon via benzocyclobutene
Online Access:	http://www.mdpi.com/1424-8220/18/7/2374

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