Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon
A one-dimensional self-consistent model of capacitive coupled radio-frequency discharge between symmetrical electrodes in argon in the local approximation at atmospheric pressure is considered in this paper. Electrons, atomic and molecular ions, metastable atoms and dimers of argon, as well as atoms...
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| Format: | Article |
| Language: | English |
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Kazan Federal University
2016-09-01
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| Series: | Учёные записки Казанского университета. Серия Физико-математические науки |
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| Online Access: | http://kpfu.ru/portal/docs/F1107179356/158_3_phys_mat_7.pdf |
| _version_ | 1797965381837520896 |
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| author | V.Ju. Chebakova |
| author_facet | V.Ju. Chebakova |
| author_sort | V.Ju. Chebakova |
| collection | DOAJ |
| description | A one-dimensional self-consistent model of capacitive coupled radio-frequency discharge between symmetrical electrodes in argon in the local approximation at atmospheric pressure is considered in this paper. Electrons, atomic and molecular ions, metastable atoms and dimers of argon, as well as atoms in the ground state are taken into account in the model. A numerical algorithm is described for solving the mathematical model based on finite-dimensional approximation of the problem using difference schemes with subsequent application of the iterative process for its realization. A software package is developed in the MatLab environment to implement the algorithm of numerical calculation. The results of numerical calculations for the interelectrode distance of 0.2 and 2 cm at atmospheric pressure are given. The results of our calculations are in good agreement with the known results of field experiments and calculations. |
| first_indexed | 2024-04-11T01:59:02Z |
| format | Article |
| id | doaj.art-e86f9a1f36774410aa8719a0058a7c8f |
| institution | Directory Open Access Journal |
| issn | 2541-7746 2500-2198 |
| language | English |
| last_indexed | 2024-04-11T01:59:02Z |
| publishDate | 2016-09-01 |
| publisher | Kazan Federal University |
| record_format | Article |
| series | Учёные записки Казанского университета. Серия Физико-математические науки |
| spelling | doaj.art-e86f9a1f36774410aa8719a0058a7c8f2023-01-03T04:46:13ZengKazan Federal UniversityУчёные записки Казанского университета. Серия Физико-математические науки2541-77462500-21982016-09-011583404423Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in ArgonV.Ju. Chebakova0Kazan Federal University, Kazan, 420008 RussiaA one-dimensional self-consistent model of capacitive coupled radio-frequency discharge between symmetrical electrodes in argon in the local approximation at atmospheric pressure is considered in this paper. Electrons, atomic and molecular ions, metastable atoms and dimers of argon, as well as atoms in the ground state are taken into account in the model. A numerical algorithm is described for solving the mathematical model based on finite-dimensional approximation of the problem using difference schemes with subsequent application of the iterative process for its realization. A software package is developed in the MatLab environment to implement the algorithm of numerical calculation. The results of numerical calculations for the interelectrode distance of 0.2 and 2 cm at atmospheric pressure are given. The results of our calculations are in good agreement with the known results of field experiments and calculations.http://kpfu.ru/portal/docs/F1107179356/158_3_phys_mat_7.pdfmathematical simulationradio-frequency capacitive dischargedischarge at atmospheric pressurelocal approximationnumerical experiments |
| spellingShingle | V.Ju. Chebakova Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon Учёные записки Казанского университета. Серия Физико-математические науки mathematical simulation radio-frequency capacitive discharge discharge at atmospheric pressure local approximation numerical experiments |
| title | Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon |
| title_full | Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon |
| title_fullStr | Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon |
| title_full_unstemmed | Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon |
| title_short | Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon |
| title_sort | simulation of radio frequency capacitive discharge at atmospheric pressure in argon |
| topic | mathematical simulation radio-frequency capacitive discharge discharge at atmospheric pressure local approximation numerical experiments |
| url | http://kpfu.ru/portal/docs/F1107179356/158_3_phys_mat_7.pdf |
| work_keys_str_mv | AT vjuchebakova simulationofradiofrequencycapacitivedischargeatatmosphericpressureinargon |