Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon
A one-dimensional self-consistent model of capacitive coupled radio-frequency discharge between symmetrical electrodes in argon in the local approximation at atmospheric pressure is considered in this paper. Electrons, atomic and molecular ions, metastable atoms and dimers of argon, as well as atoms...
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| Format: | Article |
| Language: | English |
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Kazan Federal University
2016-09-01
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| Series: | Учёные записки Казанского университета. Серия Физико-математические науки |
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| Online Access: | http://kpfu.ru/portal/docs/F1107179356/158_3_phys_mat_7.pdf |