The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.

Bibliographic Details
Main Authors: Jianzhong Gu, Minghua Lu, Zheng Qin, Minghong Wu, Zheng Jiao
Format: Article
Language:English
Published: MDPI AG 2003-08-01
Series:Sensors
Subjects:
Thin film
spray pyrolysis
Gas sensor
ITO
Online Access:http://www.mdpi.com/1424-8220/3/8/285/

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