Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films

Abstract Copper iodide (CuI) is a high‐performance p‐type transparent semiconductor that can be used in numerous applications, such as transistors, diodes, and solar cells. However, the lack of conformal and scalable methods to deposit CuI thin films limits its establishment in applications that inv...

Full description

Bibliographic Details
Main Authors: Alexander Weiß, Jacqueline Goldmann, Sakari Kettunen, Georgi Popov, Tomi Iivonen, Miika Mattinen, Pasi Jalkanen, Timo Hatanpää, Markku Leskelä, Mikko Ritala, Marianna Kemell
Format: Article
Language:English
Published: Wiley-VCH 2023-01-01
Series:Advanced Materials Interfaces
Subjects:
Online Access:https://doi.org/10.1002/admi.202201860
_version_ 1797730916660936704
author Alexander Weiß
Jacqueline Goldmann
Sakari Kettunen
Georgi Popov
Tomi Iivonen
Miika Mattinen
Pasi Jalkanen
Timo Hatanpää
Markku Leskelä
Mikko Ritala
Marianna Kemell
author_facet Alexander Weiß
Jacqueline Goldmann
Sakari Kettunen
Georgi Popov
Tomi Iivonen
Miika Mattinen
Pasi Jalkanen
Timo Hatanpää
Markku Leskelä
Mikko Ritala
Marianna Kemell
author_sort Alexander Weiß
collection DOAJ
description Abstract Copper iodide (CuI) is a high‐performance p‐type transparent semiconductor that can be used in numerous applications, such as transistors, diodes, and solar cells. However, the lack of conformal and scalable methods to deposit CuI thin films limits its establishment in applications that involve complex‐shaped and/or large substrate areas. In this work, atomic layer deposition (ALD) is employed to enable scalable and conformal thin film deposition. A two‐step approach relying on ALD of CuO and its subsequent conversion to CuI via exposure to HI vapor at room temperature is demonstrated. The resulting CuI films are phase‐pure, uniform, and of high purity. Furthermore, CuI films on several substrates such as Si, amorphous Al2O3, n‐type TiO2, and γ‐CsPbI3 perovskite are prepared. With the resulting n‐TiO2/p‐CuI structure, the easy and straightforward fabrication of a diode structure as a proof‐of‐concept device is demonstrated. Moreover, the successful deposition of CuI on γ‐CsPbI3 proves the compatibility of the process for using CuI as the hole transport layer in perovskite solar cell applications in the nip‐configuration. It is believed that the ALD‐based approach described in this work will offer a viable alternative for depositing transparent conductive p‐type CuI thin films in applications that involve complex high aspect ratio structures and large substrate areas.
first_indexed 2024-03-12T11:51:03Z
format Article
id doaj.art-e8ba49444f6f4cb6ad4411c38c05b12d
institution Directory Open Access Journal
issn 2196-7350
language English
last_indexed 2024-03-12T11:51:03Z
publishDate 2023-01-01
publisher Wiley-VCH
record_format Article
series Advanced Materials Interfaces
spelling doaj.art-e8ba49444f6f4cb6ad4411c38c05b12d2023-08-31T08:56:33ZengWiley-VCHAdvanced Materials Interfaces2196-73502023-01-01103n/an/a10.1002/admi.202201860Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin FilmsAlexander Weiß0Jacqueline Goldmann1Sakari Kettunen2Georgi Popov3Tomi Iivonen4Miika Mattinen5Pasi Jalkanen6Timo Hatanpää7Markku Leskelä8Mikko Ritala9Marianna Kemell10Department of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Physics University of Helsinki P. O. Box 43 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P. O. Box 55 Helsinki FI‐00014 FinlandAbstract Copper iodide (CuI) is a high‐performance p‐type transparent semiconductor that can be used in numerous applications, such as transistors, diodes, and solar cells. However, the lack of conformal and scalable methods to deposit CuI thin films limits its establishment in applications that involve complex‐shaped and/or large substrate areas. In this work, atomic layer deposition (ALD) is employed to enable scalable and conformal thin film deposition. A two‐step approach relying on ALD of CuO and its subsequent conversion to CuI via exposure to HI vapor at room temperature is demonstrated. The resulting CuI films are phase‐pure, uniform, and of high purity. Furthermore, CuI films on several substrates such as Si, amorphous Al2O3, n‐type TiO2, and γ‐CsPbI3 perovskite are prepared. With the resulting n‐TiO2/p‐CuI structure, the easy and straightforward fabrication of a diode structure as a proof‐of‐concept device is demonstrated. Moreover, the successful deposition of CuI on γ‐CsPbI3 proves the compatibility of the process for using CuI as the hole transport layer in perovskite solar cell applications in the nip‐configuration. It is believed that the ALD‐based approach described in this work will offer a viable alternative for depositing transparent conductive p‐type CuI thin films in applications that involve complex high aspect ratio structures and large substrate areas.https://doi.org/10.1002/admi.202201860atomic layer depositioncopper(I) iodidehole transport layerperovskite solar celltransparent p‐type semiconductor
spellingShingle Alexander Weiß
Jacqueline Goldmann
Sakari Kettunen
Georgi Popov
Tomi Iivonen
Miika Mattinen
Pasi Jalkanen
Timo Hatanpää
Markku Leskelä
Mikko Ritala
Marianna Kemell
Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films
Advanced Materials Interfaces
atomic layer deposition
copper(I) iodide
hole transport layer
perovskite solar cell
transparent p‐type semiconductor
title Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films
title_full Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films
title_fullStr Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films
title_full_unstemmed Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films
title_short Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films
title_sort conversion of ald cuo thin films into transparent conductive p type cui thin films
topic atomic layer deposition
copper(I) iodide
hole transport layer
perovskite solar cell
transparent p‐type semiconductor
url https://doi.org/10.1002/admi.202201860
work_keys_str_mv AT alexanderweiß conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT jacquelinegoldmann conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT sakarikettunen conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT georgipopov conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT tomiiivonen conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT miikamattinen conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT pasijalkanen conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT timohatanpaa conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT markkuleskela conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT mikkoritala conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms
AT mariannakemell conversionofaldcuothinfilmsintotransparentconductiveptypecuithinfilms