STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS
Nanomeshy aluminum film is the promising alternative to a tin-doped indium oxide film (ITO) as transparent conductive electrodes. In this paper we describe the fabrication of a nanomeshy aluminum film by electrochemical anodization of aluminum deposited by magnetron sputtering on a glass substrate....
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Format: | Article |
Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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Online Access: | https://doklady.bsuir.by/jour/article/view/60 |
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author | A. A. Stsiapanau A. G. Smirnov |
author_facet | A. A. Stsiapanau A. G. Smirnov |
author_sort | A. A. Stsiapanau |
collection | DOAJ |
description | Nanomeshy aluminum film is the promising alternative to a tin-doped indium oxide film (ITO) as transparent conductive electrodes. In this paper we describe the fabrication of a nanomeshy aluminum film by electrochemical anodization of aluminum deposited by magnetron sputtering on a glass substrate. The process of anodization is strictly controlled by the characteristic changes of process parameters, followed by selective chemical etching of aluminum oxide. We proposed the model for a nanomeshy Al film and calculated numerically the dependences of their optical transmittance and surface resistance on the characteristic dimensions of the network structure. The proposed method allows fabricating the uniform and stable nanomeshy aluminum film with transparency up to 80% with less than 50 Ohm/ð resistance. |
first_indexed | 2024-04-10T03:16:59Z |
format | Article |
id | doaj.art-e9a2b899e9ca4aa7aac8907d6e097b82 |
institution | Directory Open Access Journal |
issn | 1729-7648 |
language | Russian |
last_indexed | 2025-03-14T05:52:42Z |
publishDate | 2019-06-01 |
publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
record_format | Article |
series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
spelling | doaj.art-e9a2b899e9ca4aa7aac8907d6e097b822025-03-05T12:42:59ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-0105212759STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMSA. A. Stsiapanau0A. G. Smirnov1Белорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиNanomeshy aluminum film is the promising alternative to a tin-doped indium oxide film (ITO) as transparent conductive electrodes. In this paper we describe the fabrication of a nanomeshy aluminum film by electrochemical anodization of aluminum deposited by magnetron sputtering on a glass substrate. The process of anodization is strictly controlled by the characteristic changes of process parameters, followed by selective chemical etching of aluminum oxide. We proposed the model for a nanomeshy Al film and calculated numerically the dependences of their optical transmittance and surface resistance on the characteristic dimensions of the network structure. The proposed method allows fabricating the uniform and stable nanomeshy aluminum film with transparency up to 80% with less than 50 Ohm/ð resistance.https://doklady.bsuir.by/jour/article/view/60наносетчатая пленка алюминияэлектрохимическое анодированиепрозрачные покрытияоптоэлектроника |
spellingShingle | A. A. Stsiapanau A. G. Smirnov STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki наносетчатая пленка алюминия электрохимическое анодирование прозрачные покрытия оптоэлектроника |
title | STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS |
title_full | STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS |
title_fullStr | STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS |
title_full_unstemmed | STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS |
title_short | STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS |
title_sort | structure morphology and electrical properties of transparent nanomeshy aluminum films |
topic | наносетчатая пленка алюминия электрохимическое анодирование прозрачные покрытия оптоэлектроника |
url | https://doklady.bsuir.by/jour/article/view/60 |
work_keys_str_mv | AT aastsiapanau structuremorphologyandelectricalpropertiesoftransparentnanomeshyaluminumfilms AT agsmirnov structuremorphologyandelectricalpropertiesoftransparentnanomeshyaluminumfilms |