STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS

Nanomeshy aluminum film is the promising alternative to a tin-doped indium oxide film (ITO) as transparent conductive electrodes. In this paper we describe the fabrication of a nanomeshy aluminum film by electrochemical anodization of aluminum deposited by magnetron sputtering on a glass substrate....

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Main Authors: A. A. Stsiapanau, A. G. Smirnov
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
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Online Access:https://doklady.bsuir.by/jour/article/view/60
_version_ 1826547630097825792
author A. A. Stsiapanau
A. G. Smirnov
author_facet A. A. Stsiapanau
A. G. Smirnov
author_sort A. A. Stsiapanau
collection DOAJ
description Nanomeshy aluminum film is the promising alternative to a tin-doped indium oxide film (ITO) as transparent conductive electrodes. In this paper we describe the fabrication of a nanomeshy aluminum film by electrochemical anodization of aluminum deposited by magnetron sputtering on a glass substrate. The process of anodization is strictly controlled by the characteristic changes of process parameters, followed by selective chemical etching of aluminum oxide. We proposed the model for a nanomeshy Al film and calculated numerically the dependences of their optical transmittance and surface resistance on the characteristic dimensions of the network structure. The proposed method allows fabricating the uniform and stable nanomeshy aluminum film with transparency up to 80% with less than 50 Ohm/ð resistance.
first_indexed 2024-04-10T03:16:59Z
format Article
id doaj.art-e9a2b899e9ca4aa7aac8907d6e097b82
institution Directory Open Access Journal
issn 1729-7648
language Russian
last_indexed 2025-03-14T05:52:42Z
publishDate 2019-06-01
publisher Educational institution «Belarusian State University of Informatics and Radioelectronics»
record_format Article
series Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
spelling doaj.art-e9a2b899e9ca4aa7aac8907d6e097b822025-03-05T12:42:59ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-0105212759STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMSA. A. Stsiapanau0A. G. Smirnov1Белорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиNanomeshy aluminum film is the promising alternative to a tin-doped indium oxide film (ITO) as transparent conductive electrodes. In this paper we describe the fabrication of a nanomeshy aluminum film by electrochemical anodization of aluminum deposited by magnetron sputtering on a glass substrate. The process of anodization is strictly controlled by the characteristic changes of process parameters, followed by selective chemical etching of aluminum oxide. We proposed the model for a nanomeshy Al film and calculated numerically the dependences of their optical transmittance and surface resistance on the characteristic dimensions of the network structure. The proposed method allows fabricating the uniform and stable nanomeshy aluminum film with transparency up to 80% with less than 50 Ohm/ð resistance.https://doklady.bsuir.by/jour/article/view/60наносетчатая пленка алюминияэлектрохимическое анодированиепрозрачные покрытияоптоэлектроника
spellingShingle A. A. Stsiapanau
A. G. Smirnov
STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
наносетчатая пленка алюминия
электрохимическое анодирование
прозрачные покрытия
оптоэлектроника
title STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS
title_full STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS
title_fullStr STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS
title_full_unstemmed STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS
title_short STRUCTURE, MORPHOLOGY AND ELECTRICAL PROPERTIES OF TRANSPARENT NANOMESHY ALUMINUM FILMS
title_sort structure morphology and electrical properties of transparent nanomeshy aluminum films
topic наносетчатая пленка алюминия
электрохимическое анодирование
прозрачные покрытия
оптоэлектроника
url https://doklady.bsuir.by/jour/article/view/60
work_keys_str_mv AT aastsiapanau structuremorphologyandelectricalpropertiesoftransparentnanomeshyaluminumfilms
AT agsmirnov structuremorphologyandelectricalpropertiesoftransparentnanomeshyaluminumfilms