Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Femtosecond laser direct writing is widely exploited in surface periodic structures processing. However, this technique still faces challenges in obtaining high surface homogeneity and flexible morphology controllability. In this study, a flexible and efficient approach has been proposed to fabricat...

Full description

Bibliographic Details
Main Authors: Huang Ji, Jiang Lan, Li Xiaowei, Wang Andong, Wang Zhi, Wang Qingsong, Hu Jie, Qu Liangti, Cui Tianhong, Lu Yongfeng
Format: Article
Language:English
Published: De Gruyter 2019-05-01
Series:Nanophotonics
Subjects:
femtosecond laser
chemical etching
nanograting structures
highly homogeneous
highly controllable
Online Access:https://doi.org/10.1515/nanoph-2019-0056

Internet

https://doi.org/10.1515/nanoph-2019-0056

Similar Items