Low-Cost Microbolometer Type Infrared Detectors
The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMO...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/9/800 |
| _version_ | 1827707849711550464 |
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| author | Le Yu Yaozu Guo Haoyu Zhu Mingcheng Luo Ping Han Xiaoli Ji |
| author_facet | Le Yu Yaozu Guo Haoyu Zhu Mingcheng Luo Ping Han Xiaoli Ji |
| author_sort | Le Yu |
| collection | DOAJ |
| description | The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMOS process and simple post-CMOS micro-electro-mechanical system (MEMS) process. With the technological development, the performance of the commercialized CMOS-compatible microbolometers shows only a small gap with that of the mainstream ones. This paper reviews the basics and recent advances of the CMOS-compatible microbolometer IRFPAs in the aspects of the pixel structure, the read-out integrated circuit (ROIC), the focal plane array, and the vacuum packaging. |
| first_indexed | 2024-03-10T16:54:29Z |
| format | Article |
| id | doaj.art-e9e32d52afe245039f6c256d4d846224 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T16:54:29Z |
| publishDate | 2020-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-e9e32d52afe245039f6c256d4d8462242023-11-20T11:12:44ZengMDPI AGMicromachines2072-666X2020-08-0111980010.3390/mi11090800Low-Cost Microbolometer Type Infrared DetectorsLe Yu0Yaozu Guo1Haoyu Zhu2Mingcheng Luo3Ping Han4Xiaoli Ji5School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science and Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science and Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science and Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science and Engineering, Nanjing University, Nanjing 210093, ChinaSchool of Electronic Science and Engineering, Nanjing University, Nanjing 210093, ChinaThe complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMOS process and simple post-CMOS micro-electro-mechanical system (MEMS) process. With the technological development, the performance of the commercialized CMOS-compatible microbolometers shows only a small gap with that of the mainstream ones. This paper reviews the basics and recent advances of the CMOS-compatible microbolometer IRFPAs in the aspects of the pixel structure, the read-out integrated circuit (ROIC), the focal plane array, and the vacuum packaging.https://www.mdpi.com/2072-666X/11/9/800microbolometercomplementary metal oxide semiconductor (CMOS)-compatibleuncooled infrared detectorsthermal detectorsinfrared focal plane array (IRFPA)read-out integrated circuit (ROIC) |
| spellingShingle | Le Yu Yaozu Guo Haoyu Zhu Mingcheng Luo Ping Han Xiaoli Ji Low-Cost Microbolometer Type Infrared Detectors Micromachines microbolometer complementary metal oxide semiconductor (CMOS)-compatible uncooled infrared detectors thermal detectors infrared focal plane array (IRFPA) read-out integrated circuit (ROIC) |
| title | Low-Cost Microbolometer Type Infrared Detectors |
| title_full | Low-Cost Microbolometer Type Infrared Detectors |
| title_fullStr | Low-Cost Microbolometer Type Infrared Detectors |
| title_full_unstemmed | Low-Cost Microbolometer Type Infrared Detectors |
| title_short | Low-Cost Microbolometer Type Infrared Detectors |
| title_sort | low cost microbolometer type infrared detectors |
| topic | microbolometer complementary metal oxide semiconductor (CMOS)-compatible uncooled infrared detectors thermal detectors infrared focal plane array (IRFPA) read-out integrated circuit (ROIC) |
| url | https://www.mdpi.com/2072-666X/11/9/800 |
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