Low-Cost Microbolometer Type Infrared Detectors

Low-Cost Microbolometer Type Infrared Detectors

The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPAs) is based on the combination of the standard CMO...

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Bibliographic Details
Main Authors:	Le Yu, Yaozu Guo, Haoyu Zhu, Mingcheng Luo, Ping Han, Xiaoli Ji
Format:	Article
Language:	English
Published:	MDPI AG 2020-08-01
Series:	Micromachines
Subjects:	microbolometer complementary metal oxide semiconductor (CMOS)-compatible uncooled infrared detectors thermal detectors infrared focal plane array (IRFPA) read-out integrated circuit (ROIC)
Online Access:	https://www.mdpi.com/2072-666X/11/9/800

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