Fabrication of fused silica microstructure based on the femtosecond laser
Ultrafast pulsed lasers can facilitate the manufacturing of complex microstructures. However, previous laser processing applications have focused on static components. Consequently, the application of laser processing in high-performance resonant structures has received less attention. Ultrafast las...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0059443 |