Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review
The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-07-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/8/1507 |
| _version_ | 1797583864889081856 |
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| author | Yan Liu Xin Jiang Haotian Yang Hongbo Qin Weidong Wang |
| author_facet | Yan Liu Xin Jiang Haotian Yang Hongbo Qin Weidong Wang |
| author_sort | Yan Liu |
| collection | DOAJ |
| description | The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful measuring platform owing to its simple operational principle, favorable sensitivity and accuracy, mature fabrication, and low cost. Structural engineering in the sensing diaphragm and piezoresistor serves as a core issue in the construction of the micropressure sensor and undertakes the task of promoting the overall performance for the device. This paper focuses on the representative structural engineering in the development of the piezoresistive micropressure sensor, largely concerning the trade-off between measurement sensitivity and nonlinearity. Functional elements on the top and bottom layers of the diaphragm are summarized, and the influences of the shapes and arrangements of the piezoresistors are also discussed. The addition of new materials endows the research with possible solutions for applications in harsh environments. A prediction for future tends is presented, including emerging advances in materials science and micromachining techniques that will help the sensor become a stronger participant for the upcoming sensor epoch. |
| first_indexed | 2024-03-10T23:44:07Z |
| format | Article |
| id | doaj.art-ea68ba0abb794211b19bd8c7c102cbff |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T23:44:07Z |
| publishDate | 2023-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-ea68ba0abb794211b19bd8c7c102cbff2023-11-19T02:12:38ZengMDPI AGMicromachines2072-666X2023-07-01148150710.3390/mi14081507Structural Engineering in Piezoresistive Micropressure Sensors: A Focused ReviewYan Liu0Xin Jiang1Haotian Yang2Hongbo Qin3Weidong Wang4School of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, ChinaSchool of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, ChinaSchool of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, ChinaSchool of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, ChinaSchool of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, ChinaThe longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful measuring platform owing to its simple operational principle, favorable sensitivity and accuracy, mature fabrication, and low cost. Structural engineering in the sensing diaphragm and piezoresistor serves as a core issue in the construction of the micropressure sensor and undertakes the task of promoting the overall performance for the device. This paper focuses on the representative structural engineering in the development of the piezoresistive micropressure sensor, largely concerning the trade-off between measurement sensitivity and nonlinearity. Functional elements on the top and bottom layers of the diaphragm are summarized, and the influences of the shapes and arrangements of the piezoresistors are also discussed. The addition of new materials endows the research with possible solutions for applications in harsh environments. A prediction for future tends is presented, including emerging advances in materials science and micromachining techniques that will help the sensor become a stronger participant for the upcoming sensor epoch.https://www.mdpi.com/2072-666X/14/8/1507micropressure sensorpiezoresistivestructural engineeringdiaphragmpiezoresistor |
| spellingShingle | Yan Liu Xin Jiang Haotian Yang Hongbo Qin Weidong Wang Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review Micromachines micropressure sensor piezoresistive structural engineering diaphragm piezoresistor |
| title | Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review |
| title_full | Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review |
| title_fullStr | Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review |
| title_full_unstemmed | Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review |
| title_short | Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review |
| title_sort | structural engineering in piezoresistive micropressure sensors a focused review |
| topic | micropressure sensor piezoresistive structural engineering diaphragm piezoresistor |
| url | https://www.mdpi.com/2072-666X/14/8/1507 |
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