Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful...

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Bibliographic Details
Main Authors: Yan Liu, Xin Jiang, Haotian Yang, Hongbo Qin, Weidong Wang
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/8/1507

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