Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review
The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful...
Main Authors: | Yan Liu, Xin Jiang, Haotian Yang, Hongbo Qin, Weidong Wang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-07-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/8/1507 |
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