Photoconductivity Spectra of Amorphous Hydrogenated Silicon Films with Nanocrystalline Inclusions
The technique for the study of amorphous hydrogenated silicon films with nanocrystalline inclusions non-uniformly distributed through the thickness (pm-Si:H) deposited on glass substrates is devised. Photocurrent spectra for the films of various thicknesses are studied when illuminated from the free...
| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2016-10-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/134 |
| Summary: | The technique for the study of amorphous hydrogenated silicon films with nanocrystalline inclusions non-uniformly distributed through the thickness (pm-Si:H) deposited on glass substrates is devised. Photocurrent spectra for the films of various thicknesses are studied when illuminated from the free film surface and from of the glass substrate. The presence of residual photoconductivity and two peaks in photoconductivity spectra of the films are determinated that, apparently, indicates the presence of crystalline and amorphous phases in the films. |
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| ISSN: | 1993-8985 2658-4794 |