Enhanced Sensitivity of FeGa Thin-Film Coated SAW Current Sensor
A surface acoustic wave (SAW) device is proposed for sensing current by employing the patterned FeGa thin film as the sensitive interface. The layered media structure of FeGa/SiO<sub>2</sub>/LiNbO<sub>3</sub> was established to reveal the working principle of the sensors, and...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-12-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/24/11726 |