Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

Complex optical elements have the advantages of improving image quality and optical performance and expanding the field of view. Therefore, it is widely used in X-ray scientific devices, adaptive optical elements, high-energy laser systems, and other fields and is a hot research direction in precisi...

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Bibliographic Details
Main Authors:	Xinxue Ma, Jianli Wang, Bin Wang, Xinyue Liu, Yuqiang Chen
Format:	Article
Language:	English
Published:	MDPI AG 2023-05-01
Series:	Micromachines
Subjects:	complex surface 1 surface measurement 2 optical metrology 3 wavefront sensing 4
Online Access:	https://www.mdpi.com/2072-666X/14/6/1142

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