Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system
Complex multilayer film structures were fabricated through a custom-built angular DC magnetron co-sputtering system. In this system, separate Cu, Al, and brass (Cu + Zn) targets were mounted on three magnetron guns, working in conjunction with a rotating substrate. This study aimed to compare the pr...
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| Format: | Article |
| Language: | English |
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Elsevier
2023-11-01
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| Series: | Heliyon |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2405844023094550 |
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| author | Preecha Changyom Komgrit Leksakul Dheerawan Boonyawan Pongsawat Premphet Norrapon Vichiansan |
| author_facet | Preecha Changyom Komgrit Leksakul Dheerawan Boonyawan Pongsawat Premphet Norrapon Vichiansan |
| author_sort | Preecha Changyom |
| collection | DOAJ |
| description | Complex multilayer film structures were fabricated through a custom-built angular DC magnetron co-sputtering system. In this system, separate Cu, Al, and brass (Cu + Zn) targets were mounted on three magnetron guns, working in conjunction with a rotating substrate. This study aimed to compare the properties of films with intricate structures, which were sputtered onto glass slides and polypropylene substrates. The sputtering process was optimized using a Box–Behnken design, considering three variable operating conditions: substrate rotation speed, sputtering time, and sputtering voltage. The Analysis of Variance (ANOVA) results for film thickness and roughness, sputtered with three different materials onto glass slides and polypropylene (PP) substrates, indicated that all three independent variables significantly influenced the optimum response, with P-values less than 0.05 (<α = 0.05). The optimal conditions for maximizing the thickness and roughness of the sputtered film on PP substrates differed from those obtained for the thin-film properties of the sputtered film on glass slide substrates. Top-view images of the surface morphology revealed a dense and granular structure for the film deposited on the glass slide, whereas some grooves between the grains and fractures were observed in the film on the PP substrate.Additionally, it was evident that these sputtered multilayer films exhibited a complex structure, as reflected in the uniform and homogeneous distribution of Cu, Al, and Zn atoms on both glass slides and PP substrates. |
| first_indexed | 2024-03-09T09:17:20Z |
| format | Article |
| id | doaj.art-eb33237db2884879918004e7e121a4b2 |
| institution | Directory Open Access Journal |
| issn | 2405-8440 |
| language | English |
| last_indexed | 2024-03-09T09:17:20Z |
| publishDate | 2023-11-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Heliyon |
| spelling | doaj.art-eb33237db2884879918004e7e121a4b22023-12-02T07:05:33ZengElsevierHeliyon2405-84402023-11-01911e22247Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering systemPreecha Changyom0Komgrit Leksakul1Dheerawan Boonyawan2Pongsawat Premphet3Norrapon Vichiansan4Ph.D. Degree Program in Industrial Engineering, Department of Industrial Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai 50200, ThailandDepartment of Industrial Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai 50200, Thailand; Corresponding author.Department of Physics and Materials Science, Faculty of Science, Chiang Mai University, Chiang Mai 50200, ThailandDepartment of Industrial Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai 50200, ThailandMultidisciplinary Center, Faculty of Engineering, Chiang Mai University, Chiang Mai 50200, ThailandComplex multilayer film structures were fabricated through a custom-built angular DC magnetron co-sputtering system. In this system, separate Cu, Al, and brass (Cu + Zn) targets were mounted on three magnetron guns, working in conjunction with a rotating substrate. This study aimed to compare the properties of films with intricate structures, which were sputtered onto glass slides and polypropylene substrates. The sputtering process was optimized using a Box–Behnken design, considering three variable operating conditions: substrate rotation speed, sputtering time, and sputtering voltage. The Analysis of Variance (ANOVA) results for film thickness and roughness, sputtered with three different materials onto glass slides and polypropylene (PP) substrates, indicated that all three independent variables significantly influenced the optimum response, with P-values less than 0.05 (<α = 0.05). The optimal conditions for maximizing the thickness and roughness of the sputtered film on PP substrates differed from those obtained for the thin-film properties of the sputtered film on glass slide substrates. Top-view images of the surface morphology revealed a dense and granular structure for the film deposited on the glass slide, whereas some grooves between the grains and fractures were observed in the film on the PP substrate.Additionally, it was evident that these sputtered multilayer films exhibited a complex structure, as reflected in the uniform and homogeneous distribution of Cu, Al, and Zn atoms on both glass slides and PP substrates.http://www.sciencedirect.com/science/article/pii/S2405844023094550Magnetron sputteringAngular sputteringCo-sputteringMultilayer sputtering |
| spellingShingle | Preecha Changyom Komgrit Leksakul Dheerawan Boonyawan Pongsawat Premphet Norrapon Vichiansan Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system Heliyon Magnetron sputtering Angular sputtering Co-sputtering Multilayer sputtering |
| title | Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system |
| title_full | Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system |
| title_fullStr | Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system |
| title_full_unstemmed | Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system |
| title_short | Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system |
| title_sort | comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular dc magnetron co sputtering system |
| topic | Magnetron sputtering Angular sputtering Co-sputtering Multilayer sputtering |
| url | http://www.sciencedirect.com/science/article/pii/S2405844023094550 |
| work_keys_str_mv | AT preechachangyom comparisonofpropertiesofmultilayerfilmsputteredonglassandpolypropylenesubstrateswithangulardcmagnetroncosputteringsystem AT komgritleksakul comparisonofpropertiesofmultilayerfilmsputteredonglassandpolypropylenesubstrateswithangulardcmagnetroncosputteringsystem AT dheerawanboonyawan comparisonofpropertiesofmultilayerfilmsputteredonglassandpolypropylenesubstrateswithangulardcmagnetroncosputteringsystem AT pongsawatpremphet comparisonofpropertiesofmultilayerfilmsputteredonglassandpolypropylenesubstrateswithangulardcmagnetroncosputteringsystem AT norraponvichiansan comparisonofpropertiesofmultilayerfilmsputteredonglassandpolypropylenesubstrateswithangulardcmagnetroncosputteringsystem |