Fabrication of Nb/A1 Superconducting Tunnel Junction
We report the successful fabrication and I--V curve superconductivity test results of the Nb/Al-based superconducting tunnel junctions. STJs with side-lengths of 20, 40, 60 and 80 μm were fabricated by deposition of polycrystalline Nb/Al/AlOx/Al/Nb 5-layer thin films incorporated on a 3-inch Si wafe...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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The Korean Space Science Society
2004-12-01
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| Series: | Journal of Astronomy and Space Sciences |
| Subjects: | |
| Online Access: | http://ocean.kisti.re.kr/downfile/volume/kosss/OJOOBS/2004/v21n4/OJOOBS_2004_v21n4_481.pdf |
| _version_ | 1797368489186426880 |
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| author | Sung-Ik Cho Young-Sik Park Jang-Hyun Park Yong-Ho Lee Sang-Kil Lee Sug-Whan Kim Wonyoung Han |
| author_facet | Sung-Ik Cho Young-Sik Park Jang-Hyun Park Yong-Ho Lee Sang-Kil Lee Sug-Whan Kim Wonyoung Han |
| author_sort | Sung-Ik Cho |
| collection | DOAJ |
| description | We report the successful fabrication and I--V curve superconductivity test results of the Nb/Al-based superconducting tunnel junctions. STJs with side-lengths of 20, 40, 60 and 80 μm were fabricated by deposition of polycrystalline Nb/Al/AlOx/Al/Nb 5-layer thin films incorporated on a 3-inch Si wafer. STJ was designed by TannerTM L-Edit 8.3 program, and fabricated in SQUID fabrication facility, KRISS. 5-layer STJ thin-films were fabricated using UV photolithography, DC magnetron sputtering, Reactive ion etching, and CVD(Chemical Vapor Deposition) techniques. Superconducting state test for STJ was succeeded in 4K with liquid helium cooling system. Their performance indicators such as energy gap, normal resistance, normal resistivity, dynamic resistance, dynamic resistivity, and quality factor were measured from I--V curve. Fabricated Nb/Al STJ shows 11% higher FWHM energy resolution than genuine Nb STJ. |
| first_indexed | 2024-03-08T17:33:12Z |
| format | Article |
| id | doaj.art-eb665d10e23d44be8332116731c8d819 |
| institution | Directory Open Access Journal |
| issn | 2093-5587 2093-1409 |
| language | English |
| last_indexed | 2024-03-08T17:33:12Z |
| publishDate | 2004-12-01 |
| publisher | The Korean Space Science Society |
| record_format | Article |
| series | Journal of Astronomy and Space Sciences |
| spelling | doaj.art-eb665d10e23d44be8332116731c8d8192024-01-02T14:24:33ZengThe Korean Space Science SocietyJournal of Astronomy and Space Sciences2093-55872093-14092004-12-0121448149210.5140/JASS.2004.21.4.481Fabrication of Nb/A1 Superconducting Tunnel JunctionSung-Ik Cho0Young-Sik Park1Jang-Hyun Park2Yong-Ho Lee3Sang-Kil Lee4Sug-Whan Kim5Wonyoung Han6Korea Astronomy Observatory, Daejeon 305-348, KoreaKorea Astronomy Observatory, Daejeon 305-348, KoreaKorea Astronomy Observatory, Daejeon 305-348, KoreaKorea Research Institute of Standards and Science, Daejeon 305-600, KoreaKorea Research Institute of Standards and Science, Daejeon 305-600, KoreaSOL, Dept. of Astronomy and Space Science, Yonsei University, Seoul 120-749, KoreaKorea Astronomy Observatory, Daejeon 305-348, KoreaWe report the successful fabrication and I--V curve superconductivity test results of the Nb/Al-based superconducting tunnel junctions. STJs with side-lengths of 20, 40, 60 and 80 μm were fabricated by deposition of polycrystalline Nb/Al/AlOx/Al/Nb 5-layer thin films incorporated on a 3-inch Si wafer. STJ was designed by TannerTM L-Edit 8.3 program, and fabricated in SQUID fabrication facility, KRISS. 5-layer STJ thin-films were fabricated using UV photolithography, DC magnetron sputtering, Reactive ion etching, and CVD(Chemical Vapor Deposition) techniques. Superconducting state test for STJ was succeeded in 4K with liquid helium cooling system. Their performance indicators such as energy gap, normal resistance, normal resistivity, dynamic resistance, dynamic resistivity, and quality factor were measured from I--V curve. Fabricated Nb/Al STJ shows 11% higher FWHM energy resolution than genuine Nb STJ.http://ocean.kisti.re.kr/downfile/volume/kosss/OJOOBS/2004/v21n4/OJOOBS_2004_v21n4_481.pdfastronomical detectorsuperconducting tunnel junction |
| spellingShingle | Sung-Ik Cho Young-Sik Park Jang-Hyun Park Yong-Ho Lee Sang-Kil Lee Sug-Whan Kim Wonyoung Han Fabrication of Nb/A1 Superconducting Tunnel Junction Journal of Astronomy and Space Sciences astronomical detector superconducting tunnel junction |
| title | Fabrication of Nb/A1 Superconducting Tunnel Junction |
| title_full | Fabrication of Nb/A1 Superconducting Tunnel Junction |
| title_fullStr | Fabrication of Nb/A1 Superconducting Tunnel Junction |
| title_full_unstemmed | Fabrication of Nb/A1 Superconducting Tunnel Junction |
| title_short | Fabrication of Nb/A1 Superconducting Tunnel Junction |
| title_sort | fabrication of nb a1 superconducting tunnel junction |
| topic | astronomical detector superconducting tunnel junction |
| url | http://ocean.kisti.re.kr/downfile/volume/kosss/OJOOBS/2004/v21n4/OJOOBS_2004_v21n4_481.pdf |
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