Novel Generalized Three-Step Phase-Shifting Interferometry with a Slight-Tilt Reference
A convenient and powerful method is proposed and presented to find the unknown phase shifts in three-step generalized phase-shifting interferometry. A slight-tilt reference of 0.1 degrees is employed. As a result, the developed theory shows that the unknown phase shifts can be simply extracted by su...
Main Authors: | Xianfeng Xu, Tianyu Ma, Zhiyong Jiao, Liang Xu, Dejun Dai, Fangli Qiao, Ting-Chung Poon |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-11-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/9/23/5015 |
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