Metasurface array for single-shot spectroscopic ellipsometry

Abstract Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. Most conventional ellipsometers utilize mechanically rotating polarizers and grating-based spectrometers for spectropolarimetric detection. Here, we demonstr...

Full description

Bibliographic Details
Main Authors: Shun Wen, Xinyuan Xue, Shuai Wang, Yibo Ni, Liqun Sun, Yuanmu Yang
Format: Article
Language:English
Published: Nature Publishing Group 2024-04-01
Series:Light: Science & Applications
Online Access:https://doi.org/10.1038/s41377-024-01396-3

Similar Items