Metasurface array for single-shot spectroscopic ellipsometry
Abstract Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. Most conventional ellipsometers utilize mechanically rotating polarizers and grating-based spectrometers for spectropolarimetric detection. Here, we demonstr...
Main Authors: | Shun Wen, Xinyuan Xue, Shuai Wang, Yibo Ni, Liqun Sun, Yuanmu Yang |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2024-04-01
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Series: | Light: Science & Applications |
Online Access: | https://doi.org/10.1038/s41377-024-01396-3 |
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