Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition
We report on the impacts of oxygen radical ambient for (AlGa)2O3 films grown on sapphire substrates by pulsed laser deposition (PLD). All the films showed a monoclinic crystal structure and high transmittance in the ultraviolet and visible wavelength range. The surface roughness was less than 3 nm f...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2020-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5140822 |
| _version_ | 1819036421289148416 |
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| author | Fabi Zhang Congyu Hu Makoto Arita Katsuhiko Saito Tooru Tanaka Qixin Guo |
| author_facet | Fabi Zhang Congyu Hu Makoto Arita Katsuhiko Saito Tooru Tanaka Qixin Guo |
| author_sort | Fabi Zhang |
| collection | DOAJ |
| description | We report on the impacts of oxygen radical ambient for (AlGa)2O3 films grown on sapphire substrates by pulsed laser deposition (PLD). All the films showed a monoclinic crystal structure and high transmittance in the ultraviolet and visible wavelength range. The surface roughness was less than 3 nm for all films, and the surface morphology has changed by applying oxygen radical ambient. The growth rate was faster in oxygen radical ambient compared with conventional oxygen ambient. Oxygen radical ambient has influences on the crystal quality of the (AlGa)2O3 films. The Ga content in β-(AlGa)2O3 films grown with oxygen plasma assistance was higher than that without the oxygen plasma, indicating the suppression of the re-evaporation of Ga related species from the film surface by plasma assistance during the PLD process. |
| first_indexed | 2024-12-21T08:05:15Z |
| format | Article |
| id | doaj.art-ec3509060bb8479b98fff7c006599d66 |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-21T08:05:15Z |
| publishDate | 2020-06-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-ec3509060bb8479b98fff7c006599d662022-12-21T19:10:50ZengAIP Publishing LLCAIP Advances2158-32262020-06-01106065125065125-610.1063/1.5140822Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser depositionFabi Zhang0Congyu Hu1Makoto Arita2Katsuhiko Saito3Tooru Tanaka4Qixin Guo5Guangxi Key Laboratory of Precision Navigation Technology and Application, Guilin University of Electronic Technology, Guilin 541004, ChinaDepartment of Electrical and Electronic Engineering, Synchrotron Light Application Center, Saga University, Saga 840-8502, JapanDepartment of Materials Science and Engineering, Faculty of Engineering, Kyushu University, 744 Motooka, Fukuoka 819-0395, JapanDepartment of Electrical and Electronic Engineering, Synchrotron Light Application Center, Saga University, Saga 840-8502, JapanDepartment of Electrical and Electronic Engineering, Synchrotron Light Application Center, Saga University, Saga 840-8502, JapanDepartment of Electrical and Electronic Engineering, Synchrotron Light Application Center, Saga University, Saga 840-8502, JapanWe report on the impacts of oxygen radical ambient for (AlGa)2O3 films grown on sapphire substrates by pulsed laser deposition (PLD). All the films showed a monoclinic crystal structure and high transmittance in the ultraviolet and visible wavelength range. The surface roughness was less than 3 nm for all films, and the surface morphology has changed by applying oxygen radical ambient. The growth rate was faster in oxygen radical ambient compared with conventional oxygen ambient. Oxygen radical ambient has influences on the crystal quality of the (AlGa)2O3 films. The Ga content in β-(AlGa)2O3 films grown with oxygen plasma assistance was higher than that without the oxygen plasma, indicating the suppression of the re-evaporation of Ga related species from the film surface by plasma assistance during the PLD process.http://dx.doi.org/10.1063/1.5140822 |
| spellingShingle | Fabi Zhang Congyu Hu Makoto Arita Katsuhiko Saito Tooru Tanaka Qixin Guo Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition AIP Advances |
| title | Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition |
| title_full | Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition |
| title_fullStr | Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition |
| title_full_unstemmed | Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition |
| title_short | Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition |
| title_sort | impacts of oxygen radical ambient on structural and optical properties of alga 2o3 films deposited by pulsed laser deposition |
| url | http://dx.doi.org/10.1063/1.5140822 |
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