Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has been reported), pMUT rangefinders have drawn extensive atte...

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Bibliographic Details
Main Authors:	Jiong Pan, Chenyu Bai, Qincheng Zheng, Huikai Xie
Format:	Article
Language:	English
Published:	MDPI AG 2023-02-01
Series:	Micromachines
Subjects:	pMUT piezoelectric rangefinder range-finding microelectromechanical system MEMS
Online Access:	https://www.mdpi.com/2072-666X/14/2/374

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