Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum Wells

We report the growth and characterization of thick, completely relaxed {11-22}-oriented InGaN layers using epitaxial lateral overgrowth (ELO). Although it was difficult to grow ELO-InGaN layers on patterned GaN templates, we succeeded in growing ELO-InGaN layers on a patterned InGaN template. The fu...

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Main Authors: Narihito Okada, Kazuyuki Tadatomo
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/12/10/1373
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author Narihito Okada
Kazuyuki Tadatomo
author_facet Narihito Okada
Kazuyuki Tadatomo
author_sort Narihito Okada
collection DOAJ
description We report the growth and characterization of thick, completely relaxed {11-22}-oriented InGaN layers using epitaxial lateral overgrowth (ELO). Although it was difficult to grow ELO-InGaN layers on patterned GaN templates, we succeeded in growing ELO-InGaN layers on a patterned InGaN template. The full width at half maximum of the X-ray rocking curve of ELO-InGaN on the InGaN templates was less than that of non-ELO InGaN. The photoluminescence intensity of InGaN/GaN multiple quantum wells on ELO-InGaN was approximately five times stronger than that on the {11-22} GaN template.
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spelling doaj.art-ec72675fe3bd41138d9dd572ce3184642023-11-23T23:37:24ZengMDPI AGCrystals2073-43522022-09-011210137310.3390/cryst12101373Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum WellsNarihito Okada0Kazuyuki Tadatomo1Yamaguchi University, 2-16-1 Tokiwadai Ube, Yamaguchi 755-8611, JapanYamaguchi University, 2-16-1 Tokiwadai Ube, Yamaguchi 755-8611, JapanWe report the growth and characterization of thick, completely relaxed {11-22}-oriented InGaN layers using epitaxial lateral overgrowth (ELO). Although it was difficult to grow ELO-InGaN layers on patterned GaN templates, we succeeded in growing ELO-InGaN layers on a patterned InGaN template. The full width at half maximum of the X-ray rocking curve of ELO-InGaN on the InGaN templates was less than that of non-ELO InGaN. The photoluminescence intensity of InGaN/GaN multiple quantum wells on ELO-InGaN was approximately five times stronger than that on the {11-22} GaN template.https://www.mdpi.com/2073-4352/12/10/1373InGaNepitaxial lateral overgrowthmultiple quantum wells
spellingShingle Narihito Okada
Kazuyuki Tadatomo
Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum Wells
Crystals
InGaN
epitaxial lateral overgrowth
multiple quantum wells
title Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum Wells
title_full Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum Wells
title_fullStr Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum Wells
title_full_unstemmed Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum Wells
title_short Epitaxial Lateral Overgrowth of {11-22} InGaN Layers Using Patterned InGaN Template and Improvement of Optical Properties from Multiple Quantum Wells
title_sort epitaxial lateral overgrowth of 11 22 ingan layers using patterned ingan template and improvement of optical properties from multiple quantum wells
topic InGaN
epitaxial lateral overgrowth
multiple quantum wells
url https://www.mdpi.com/2073-4352/12/10/1373
work_keys_str_mv AT narihitookada epitaxiallateralovergrowthof1122inganlayersusingpatternedingantemplateandimprovementofopticalpropertiesfrommultiplequantumwells
AT kazuyukitadatomo epitaxiallateralovergrowthof1122inganlayersusingpatternedingantemplateandimprovementofopticalpropertiesfrommultiplequantumwells