Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor
A liquid permittivity sensing method is proposed, which is based on measuring the S21 of an on-chip capacitor submerged in a material under test (MUT). The real part of permittivity can be estimated from ɛ′ – |S21| fitted relation in the frequency range of 100 MHz–5 GHz, which are pre-calibrated wit...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Korean Institute of Electromagnetic Engineering and Science
2022-01-01
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| Series: | Journal of Electromagnetic Engineering and Science |
| Subjects: | |
| Online Access: | http://jees.kr/upload/pdf/jees-2022-1-r-57.pdf |
| Summary: | A liquid permittivity sensing method is proposed, which is based on measuring the S21 of an on-chip capacitor submerged in a material under test (MUT). The real part of permittivity can be estimated from ɛ′ – |S21| fitted relation in the frequency range of 100 MHz–5 GHz, which are pre-calibrated with four kinds of known materials. The on-chip capacitor is realized with a top metal in a complementary metal oxide semiconductor (CMOS) process, which has an inter-digitized structure featuring a small size of 150 μm × 195 μm. A simple circuit model of the capacitor is used to develop ɛ′ – |S21| relation with a fitting parameter. It shows less than 6.4% root-mean-square (rms) error of ɛ′ for propanol (C3H8O) at 100 MHz–5 GHz. |
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| ISSN: | 2671-7255 2671-7263 |