Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor
A liquid permittivity sensing method is proposed, which is based on measuring the S21 of an on-chip capacitor submerged in a material under test (MUT). The real part of permittivity can be estimated from ɛ′ – |S21| fitted relation in the frequency range of 100 MHz–5 GHz, which are pre-calibrated wit...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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The Korean Institute of Electromagnetic Engineering and Science
2022-01-01
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| Series: | Journal of Electromagnetic Engineering and Science |
| Subjects: | |
| Online Access: | http://jees.kr/upload/pdf/jees-2022-1-r-57.pdf |
| _version_ | 1818051202447835136 |
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| author | Hongkie Lim Dong-Ho Lee Jusung Kim Songcheol Hong |
| author_facet | Hongkie Lim Dong-Ho Lee Jusung Kim Songcheol Hong |
| author_sort | Hongkie Lim |
| collection | DOAJ |
| description | A liquid permittivity sensing method is proposed, which is based on measuring the S21 of an on-chip capacitor submerged in a material under test (MUT). The real part of permittivity can be estimated from ɛ′ – |S21| fitted relation in the frequency range of 100 MHz–5 GHz, which are pre-calibrated with four kinds of known materials. The on-chip capacitor is realized with a top metal in a complementary metal oxide semiconductor (CMOS) process, which has an inter-digitized structure featuring a small size of 150 μm × 195 μm. A simple circuit model of the capacitor is used to develop ɛ′ – |S21| relation with a fitting parameter. It shows less than 6.4% root-mean-square (rms) error of ɛ′ for propanol (C3H8O) at 100 MHz–5 GHz. |
| first_indexed | 2024-12-10T11:05:37Z |
| format | Article |
| id | doaj.art-ed0ff8028c1e4f028ef8cc622c103158 |
| institution | Directory Open Access Journal |
| issn | 2671-7255 2671-7263 |
| language | English |
| last_indexed | 2024-12-10T11:05:37Z |
| publishDate | 2022-01-01 |
| publisher | The Korean Institute of Electromagnetic Engineering and Science |
| record_format | Article |
| series | Journal of Electromagnetic Engineering and Science |
| spelling | doaj.art-ed0ff8028c1e4f028ef8cc622c1031582022-12-22T01:51:35ZengThe Korean Institute of Electromagnetic Engineering and ScienceJournal of Electromagnetic Engineering and Science2671-72552671-72632022-01-01221283310.26866/jees.2022.1.r.573475Spectroscopic Sensing Method of Liquid Permittivity with On-Chip CapacitorHongkie Lim0Dong-Ho Lee1Jusung Kim2Songcheol Hong3 Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea Department of Information and Communication Engineering, Hanbat National University, Daejeon, Korea Department of Electronics Engineering, Hanbat National University, Daejeon, Korea Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, KoreaA liquid permittivity sensing method is proposed, which is based on measuring the S21 of an on-chip capacitor submerged in a material under test (MUT). The real part of permittivity can be estimated from ɛ′ – |S21| fitted relation in the frequency range of 100 MHz–5 GHz, which are pre-calibrated with four kinds of known materials. The on-chip capacitor is realized with a top metal in a complementary metal oxide semiconductor (CMOS) process, which has an inter-digitized structure featuring a small size of 150 μm × 195 μm. A simple circuit model of the capacitor is used to develop ɛ′ – |S21| relation with a fitting parameter. It shows less than 6.4% root-mean-square (rms) error of ɛ′ for propanol (C3H8O) at 100 MHz–5 GHz.http://jees.kr/upload/pdf/jees-2022-1-r-57.pdfcalibrationcapacitive sensorcurve fittingdielectric spectroscopyinter-digitized |
| spellingShingle | Hongkie Lim Dong-Ho Lee Jusung Kim Songcheol Hong Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor Journal of Electromagnetic Engineering and Science calibration capacitive sensor curve fitting dielectric spectroscopy inter-digitized |
| title | Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor |
| title_full | Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor |
| title_fullStr | Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor |
| title_full_unstemmed | Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor |
| title_short | Spectroscopic Sensing Method of Liquid Permittivity with On-Chip Capacitor |
| title_sort | spectroscopic sensing method of liquid permittivity with on chip capacitor |
| topic | calibration capacitive sensor curve fitting dielectric spectroscopy inter-digitized |
| url | http://jees.kr/upload/pdf/jees-2022-1-r-57.pdf |
| work_keys_str_mv | AT hongkielim spectroscopicsensingmethodofliquidpermittivitywithonchipcapacitor AT dongholee spectroscopicsensingmethodofliquidpermittivitywithonchipcapacitor AT jusungkim spectroscopicsensingmethodofliquidpermittivitywithonchipcapacitor AT songcheolhong spectroscopicsensingmethodofliquidpermittivitywithonchipcapacitor |