The High-Efficiency Design Method for Capacitive MEMS Accelerometer
In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconve...
Main Authors: | Wen Liu, Tianlong Zhao, Zhiyuan He, Jingze Ye, Shaotong Gong, Xianglong Wang, Yintang Yang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-09-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/10/1891 |
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