Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer

Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer

This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate....

Полное описание

Библиографические подробности
Главные авторы:	Wei Liu, Dawei Wu
Формат:	Статья
Язык:	English
Опубликовано:	MDPI AG 2020-06-01
Серии:	Sensors
Предметы:	flexible piezoelectric micromachined ultrasonic transducer (PMUT) air low temperature adhesive bonding time of flight (TOF)
Online-ссылка:	https://www.mdpi.com/1424-8220/20/11/3333

Схожие документы

An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers
по: Mingze Gao, и др.
Опубликовано: (2023-03-01)

AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection
по: Suresh Alasatri, и др.
Опубликовано: (2018-11-01)

Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity
по: Mengjiao Qu, и др.
Опубликовано: (2022-03-01)

A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
по: Alexandre Robichaud, и др.
Опубликовано: (2021-04-01)

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film
по: Eunjung Shin, и др.
Опубликовано: (2020-06-01)

A Novel Nondestructive Testing Probe Using AlN-Based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
по: Jiawei Yin, и др.
Опубликовано: (2024-02-01)

Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films
по: Le Zhang, и др.
Опубликовано: (2024-08-01)

Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding
по: Wenling Shang, и др.
Опубликовано: (2025-01-01)

Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications
по: Yashuo He, и др.
Опубликовано: (2022-12-01)

Piezoelectric Micromachined Ultrasonic Transducers with a Cost-Effective Bottom-Up Fabrication Scheme for Millimeter-Scale Range Finding
по: Guo-Hua Feng, и др.
Опубликовано: (2019-10-01)

Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer
по: Tao Li, и др.
Опубликовано: (2023-01-01)

Curved and Annular Diaphragm Coupled Piezoelectric Micromachined Ultrasonic Transducers for High Transmit Biomedical Applications
по: Yun Zhang, и др.
Опубликовано: (2024-04-01)

Modeling and Optimization of Directly Modulated Piezoelectric Micromachined Ultrasonic Transducers
по: Flavius Pop, и др.
Опубликовано: (2020-12-01)

Advances in Capacitive Micromachined Ultrasonic Transducers
по: Kevin Brenner, и др.
Опубликовано: (2019-02-01)

Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury
по: Huicong Liu, и др.
Опубликовано: (2019-12-01)

Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array
по: Xu-Bo Wang, и др.
Опубликовано: (2021-03-01)

TALPINIŲ MIKROMONTUOJAMŲ ULTRAGARSINIŲ KEITIKLIŲ TAIKYMAS = APPLICATION OF CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
по: Evaldas Sapeliauskas, и др.
Опубликовано: (2019-12-01)

Design and Performance Enhancement of a Piezoelectric Micromachined Ultrasonic Transducer Based on NBBT Lead-Free Piezoelectric Single-Crystal Thin Film
по: Yaqi Liu, и др.
Опубликовано: (2023-09-01)

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders
по: Jiong Pan, и др.
Опубликовано: (2023-02-01)

A High Frame Rate Analog Front-End IC With Piezoelectric Micromachined Ultrasound Transducers Using Analog Multi-Line Acquisition for Ultrasound Imaging Systems
по: Ji-Yong Jeong, и др.
Опубликовано: (2021-01-01)

PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications
по: Mansoor Ahmad, и др.
Опубликовано: (2019-05-01)

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging
по: Yongqiang Qiu, и др.
Опубликовано: (2015-04-01)

Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array
по: Sanjog Vilas Joshi, и др.
Опубликовано: (2023-05-01)

A Review of Broadband Microfabricated Ultrasonic Systems for Biomedical Applications
по: Roman Yuriiovych Kostiuk, и др.
Опубликовано: (2024-08-01)

Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film
по: Changhe Sun, и др.
Опубликовано: (2018-12-01)

Squared PMUT with Enhanced Pressure Sensitivities
по: Eyglis Ledesma, и др.
Опубликовано: (2018-11-01)

Overview of Ultrasound Detection Technologies for Photoacoustic Imaging
по: Rayyan Manwar, и др.
Опубликовано: (2020-07-01)

Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer
по: Da-Chen Pang, и др.
Опубликовано: (2017-06-01)

Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding
по: Xiaoqing Wang, и др.
Опубликовано: (2016-12-01)

Recent Advances in Flexible Ultrasonic Transducers: From Materials Optimization to Imaging Applications
по: Danyang Ren, и др.
Опубликовано: (2023-01-01)

A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
по: Tao Liu, и др.
Опубликовано: (2023-12-01)

Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates
по: Tianning Liu, и др.
Опубликовано: (2021-02-01)

Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array
по: Xueying Xiu, и др.
Опубликовано: (2022-11-01)

High piezoelectricity performance in PSBZT ceramic for ultrasonic transducer
по: Shengpeng Han, и др.
Опубликовано: (2023-10-01)

On the Dynamics of a Novel Liquid-Coupled Piezoelectric Micromachined Ultrasonic Transducer Designed to Have a Reduced Resonant Frequency and Enhanced Ultrasonic Reception Capabilities
по: Stephen Sammut, и др.
Опубликовано: (2024-09-01)

Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes
по: Vincenzo Mariano Mastronardi, и др.
Опубликовано: (2024-03-01)

A Piezoelectric Micromachined Ultrasound Transducers (pMUT) Array, for Wide Bandwidth Underwater Communication Applications
по: Sina Sadeghpour, и др.
Опубликовано: (2017-08-01)

Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell
по: Yuanyu Yu, и др.
Опубликовано: (2020-02-01)

Design, Fabrication, and Characterization of Capacitive Micromachined Ultrasonic Transducers for Transcranial, Multifocus Neurostimulation
по: Tamzid Ibn Minhaj, и др.
Опубликовано: (2024-08-01)

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT
по: Haleh Nazemi, и др.
Опубликовано: (2020-04-01)