Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)–<i>x</i>%PbTiO3 (PMN–<i>x</i>%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-05-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/5/512 |
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| author | Zhihong Lei Yan Chen Guisheng Xu Jinfeng Liu Maodan Yuan Lvming Zeng Xuanrong Ji Dawei Wu |
| author_facet | Zhihong Lei Yan Chen Guisheng Xu Jinfeng Liu Maodan Yuan Lvming Zeng Xuanrong Ji Dawei Wu |
| author_sort | Zhihong Lei |
| collection | DOAJ |
| description | A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)–<i>x</i>%PbTiO3 (PMN–<i>x</i>%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN–31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (<i>d<sub>33</sub>*</i>~1200 pm/V). Our results are promising for fabricating superior PMN–31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers. |
| first_indexed | 2024-03-10T19:45:15Z |
| format | Article |
| id | doaj.art-edf872a396ce4fd8bdba472ff9122db6 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T19:45:15Z |
| publishDate | 2020-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-edf872a396ce4fd8bdba472ff9122db62023-11-20T00:55:06ZengMDPI AGMicromachines2072-666X2020-05-0111551210.3390/mi11050512Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer ApplicationsZhihong Lei0Yan Chen1Guisheng Xu2Jinfeng Liu3Maodan Yuan4Lvming Zeng5Xuanrong Ji6Dawei Wu7State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaKey Laboratory of Transparent Opto-Functional Advanced Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, ChinaKey Laboratory of Transparent Opto-Functional Advanced Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaA decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)–<i>x</i>%PbTiO3 (PMN–<i>x</i>%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN–31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (<i>d<sub>33</sub>*</i>~1200 pm/V). Our results are promising for fabricating superior PMN–31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers.https://www.mdpi.com/2072-666X/11/5/512laser micromachiningPMN–31%PT single crystalshigh-frequency transducermicron-sized kerfpiezoelectric performanceferroelectric domain |
| spellingShingle | Zhihong Lei Yan Chen Guisheng Xu Jinfeng Liu Maodan Yuan Lvming Zeng Xuanrong Ji Dawei Wu Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications Micromachines laser micromachining PMN–31%PT single crystals high-frequency transducer micron-sized kerf piezoelectric performance ferroelectric domain |
| title | Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications |
| title_full | Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications |
| title_fullStr | Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications |
| title_full_unstemmed | Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications |
| title_short | Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications |
| title_sort | micromachining of high quality pmn 31 pt single crystals for high frequency 20 mhz ultrasonic array transducer applications |
| topic | laser micromachining PMN–31%PT single crystals high-frequency transducer micron-sized kerf piezoelectric performance ferroelectric domain |
| url | https://www.mdpi.com/2072-666X/11/5/512 |
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