Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications

Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications

A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)–<i>x</i>%PbTiO3 (PMN–<i>x</i>%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with...

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Bibliographic Details
Main Authors: Zhihong Lei, Yan Chen, Guisheng Xu, Jinfeng Liu, Maodan Yuan, Lvming Zeng, Xuanrong Ji, Dawei Wu
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Micromachines
Subjects:
laser micromachining
PMN–31%PT single crystals
high-frequency transducer
micron-sized kerf
piezoelectric performance
ferroelectric domain
Online Access:https://www.mdpi.com/2072-666X/11/5/512

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